Next generation SiGeSn materials grown on Si via novel deposition chemistries

Physics & Astronomy

1. chemistry 100%
2. characterization 25%
3. format 22%
4. CMOS 20%
5. optical absorption 19%
6. platforms 19%
7. vapor deposition 17%
8. electrical properties 17%
9. synthesis 16%
10. conductivity 15%
11. impurities 15%
12. optical properties 15%
13. evaluation 14%
14. kinetics 13%
15. air 13%
16. defects 12%
17. crystals 11%