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AMAT: Defects characterization of oxide based semiconductors
Tongay, Seth Ariel
(PI)
Materials Science and Engineering
Project
:
Research project
Overview
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Physics & Astronomy
oxides
100%
characterization
89%
defects
89%
research projects
62%
leakage
27%
budgets
27%
wafers
25%
specifications
24%
schedules
20%
costs
19%
transmission electron microscopy
16%
evaluation
16%
oxygen
15%
operations research
15%
performance
14%
alloying
14%
film thickness
13%
signatures
13%
field effect transistors
13%
reactors
12%
oxidizers
10%
gallium oxides
10%
blankets
9%
continuity
8%
atomic layer epitaxy
8%
secondary ion mass spectrometry
8%
compatibility
8%
attachment
8%
indium oxides
8%
ellipsometry
8%
zinc oxides
8%
hardware
8%
crystallinity
7%
alignment
6%
electrodes
5%
air
5%