Project Details
Description
ACQUISITION OF AN INDUCTIVELY COUPLED PLASMA ETCH TOOL FOR NEW MICROSYSTEMS TECHNOLOGIES ACQUISITION OF AN INDUCTIVELY COUPLED PLASMA ETCH TOOL FOR NEW MICROSYSTEMS TECHNOLOGIES
| Status | Finished |
|---|---|
| Effective start/end date | 8/15/01 → 12/31/02 |
Funding
- National Science Foundation (NSF): $400,000.00
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