Abstract

Among the many applications of chalcogenide glasses, their involvement as an active layer in redox-conductive-bridge-memory (CBRAM) devices triggers particular interest because of their potential to replace CMOS-based NAND and flash memory. In these devices the chalcogenide glass film is in contact with a silver film, and it is of a practical interest to understand how a beam of protons can influence this dual layer structure in order to identify how the performance of the CBRAM devices will be affected. In this work we studied the influence of proton beam irradiation over a Ge40Se60/Ag film stack. Various methods of analysis including scanning atomic force microscopy (AFM), Raman spectrometry, Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD), and X-ray photoelectron spectrometry (XPS) have been applied to study the structure, topography, composition, bonding configurations, diffusion kinetics, and molecular evolution of thin films related to the active sections of CBRAM devices, and quantitative analysis of material parameters and changes is reported. The results reveal silver surface deposition and germanium oxidation, as well as change in the films chemistry as a result of proton irradiation.

Original languageEnglish (US)
JournalPhysica Status Solidi (B) Basic Research
DOIs
StateAccepted/In press - Jan 1 2017

Fingerprint

Proton beams
proton beams
Spectrometry
Thin films
thin films
Silver
silver
Germanium
Proton irradiation
Glass
proton irradiation
Flash memory
glass
Rutherford backscattering spectroscopy
Photoelectrons
Chemical analysis
Topography
x ray spectroscopy
spectroscopy
quantitative analysis

Keywords

  • Chalcogenide glasses
  • Conductive bridge random access memory
  • Irradiation effects
  • Memristors
  • Proton irradiation
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Proton Beam Effects on Ge-Se/Ag Thin Films. / Nichol, Tyler; Nagy, Gyula; Huszank, Robert; Tenne, Dmitri; Kozicki, Michael; Barnaby, Hugh; Rajta, Istvan; Mitkova, Maria.

In: Physica Status Solidi (B) Basic Research, 01.01.2017.

Research output: Contribution to journalArticle

Nichol, Tyler ; Nagy, Gyula ; Huszank, Robert ; Tenne, Dmitri ; Kozicki, Michael ; Barnaby, Hugh ; Rajta, Istvan ; Mitkova, Maria. / Proton Beam Effects on Ge-Se/Ag Thin Films. In: Physica Status Solidi (B) Basic Research. 2017.
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