Abstract
An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d 33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode which is driven by an externally applied voltage. The interaction between the tip and electric field present is potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single crystal quartz, thin film ZnO, Pb(Zr,Ti)O 3 (Zr/Ti = 30/70), and nonpiezoelectric amorphous SiO 2 thin films. The system was also used to measure d 33 hysteresis loops for Pb(Zr x, Ti 1-x)O 3 thin films.
| Original language | English (US) |
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| Title of host publication | Materials Research Society Symposium - Proceedings |
| Publisher | Materials Research Society |
| Pages | 617-622 |
| Number of pages | 6 |
| Volume | 541 |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA Duration: Nov 30 1998 → Dec 3 1998 |
Other
| Other | Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' |
|---|---|
| City | Boston, MA, USA |
| Period | 11/30/98 → 12/3/98 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials