YBa2Cu3O7-δ superconducting films with low microwave surface resistance over large areas

N. Newman; K. Char; S. M. Garrison; R. W. Barton; R. C. Taber; C. B. Eom; T. H. Geballe; B. Wilkens

doi:10.1063/1.104244

YBa₂Cu₃O_7-δ superconducting films with low microwave surface resistance over large areas

N. Newman, K. Char, S. M. Garrison, R. W. Barton, R. C. Taber, C. B. Eom, T. H. Geballe, B. Wilkens

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Abstract

We demonstrate that in situ off-axis sputtering from a composite target can reproducibly fabricate very high quality YBa₂Cu₃O _7-δ films over large areas of deposition. A significant reduction in the microwave surface resistance, R_s, compared to many previously reported values is found. R_s values at 10 GHz were found to be as low as 20 μΩ at 4.2 K and 450 μΩ at 77 K. A systematic variation of several properties including the transition temperature, critical current density at high magnetic fields, and the c-axis lattice parameter across the 3.8 cm×3.8 cm (14.5 cm²) deposition area was found.

Original language	English (US)
Pages (from-to)	520-522
Number of pages	3
Journal	Applied Physics Letters
Volume	57
Issue number	5
DOIs	https://doi.org/10.1063/1.104244
State	Published - 1990
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "YBa2Cu3O7-δ superconducting films with low microwave surface resistance over large areas",

abstract = "We demonstrate that in situ off-axis sputtering from a composite target can reproducibly fabricate very high quality YBa2Cu3O 7-δ films over large areas of deposition. A significant reduction in the microwave surface resistance, Rs, compared to many previously reported values is found. Rs values at 10 GHz were found to be as low as 20 μΩ at 4.2 K and 450 μΩ at 77 K. A systematic variation of several properties including the transition temperature, critical current density at high magnetic fields, and the c-axis lattice parameter across the 3.8 cm×3.8 cm (14.5 cm2) deposition area was found.",

author = "N. Newman and K. Char and Garrison, {S. M.} and Barton, {R. W.} and Taber, {R. C.} and Eom, {C. B.} and Geballe, {T. H.} and B. Wilkens",

year = "1990",

doi = "10.1063/1.104244",

language = "English (US)",

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pages = "520--522",

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T1 - YBa2Cu3O7-δ superconducting films with low microwave surface resistance over large areas

AU - Newman, N.

AU - Char, K.

AU - Garrison, S. M.

AU - Barton, R. W.

AU - Taber, R. C.

AU - Eom, C. B.

AU - Geballe, T. H.

AU - Wilkens, B.

PY - 1990

Y1 - 1990

N2 - We demonstrate that in situ off-axis sputtering from a composite target can reproducibly fabricate very high quality YBa2Cu3O 7-δ films over large areas of deposition. A significant reduction in the microwave surface resistance, Rs, compared to many previously reported values is found. Rs values at 10 GHz were found to be as low as 20 μΩ at 4.2 K and 450 μΩ at 77 K. A systematic variation of several properties including the transition temperature, critical current density at high magnetic fields, and the c-axis lattice parameter across the 3.8 cm×3.8 cm (14.5 cm2) deposition area was found.

AB - We demonstrate that in situ off-axis sputtering from a composite target can reproducibly fabricate very high quality YBa2Cu3O 7-δ films over large areas of deposition. A significant reduction in the microwave surface resistance, Rs, compared to many previously reported values is found. Rs values at 10 GHz were found to be as low as 20 μΩ at 4.2 K and 450 μΩ at 77 K. A systematic variation of several properties including the transition temperature, critical current density at high magnetic fields, and the c-axis lattice parameter across the 3.8 cm×3.8 cm (14.5 cm2) deposition area was found.

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YBa₂Cu₃O_7-δ superconducting films with low microwave surface resistance over large areas

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