X-ray absorption spectra for transition metal high-κ dielectrics: Final state differences for intra- and inter-atomic transitions

G. Lucovsky, J. G. Hong, C. C. Fulton, Y. Zou, Robert Nemanich, H. Ade

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

The electronic structure of the high-k gate dielectrics, TiO 2, ZrO 2, and HfO 2 was investigated using x-ray absorption spectroscopy and high-resolution electron microscopy (HREM). Intra-atomic and inter-atomic transitions were found to have many type of qualitative and quantitative differences. The optical band gap differences for TiO 2, ZrO 2, and HfO 2 led to the differences between the spectral peak energies of the lowest d*-features in the O K 1 spectra. TM oxides were found to have applications in advanced Si devices in the form of high-k dielectrics, indicated by the conduction band offset energies between Si and the respective dielectrics, and the optical band gaps.

Original languageEnglish (US)
Pages (from-to)2132-2138
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number4
DOIs
StatePublished - Jul 2004
Externally publishedYes

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Optical band gaps
X ray absorption
Electron transitions
Transition metals
Absorption spectra
transition metals
absorption spectra
High resolution electron microscopy
Gate dielectrics
Conduction bands
Absorption spectroscopy
Electronic structure
x rays
x ray absorption
X rays
x ray spectroscopy
Oxides
electron microscopy
absorption spectroscopy
conduction bands

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

X-ray absorption spectra for transition metal high-κ dielectrics : Final state differences for intra- and inter-atomic transitions. / Lucovsky, G.; Hong, J. G.; Fulton, C. C.; Zou, Y.; Nemanich, Robert; Ade, H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 4, 07.2004, p. 2132-2138.

Research output: Contribution to journalArticle

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