What controls deposition rate in electron-beam chemical vapor deposition?

William B. White, Konrad Rykaczewski, Andrei G. Fedorov

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint Dive into the research topics of 'What controls deposition rate in electron-beam chemical vapor deposition?'. Together they form a unique fingerprint.

Physics & Astronomy