Wavelength-dependent Raman scattering of hydrogenated amorphous silicon carbon with red, green, and blue light excitation

Minseo Park, V. Sakhrani, J. P. Maria, J. J. Cuomo, C. W. Teng, J. F. Muth, M. E. Ware, B. J. Rodriguez, R. J. Nemanich

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

This study presents results of wavelength-dependent Raman scattering from amorphous silicon carbon (a-Si:C:H). The a-Si:C:H films were produced by radio-frequency plasma-enhanced chemical vapor deposition. Prior results with amorphous carbon indicate that laser excitation selectively probes clusters with differing sizes. Our measurements with a-Si:C:H indicate that when using red (632.8 nm), green (514.5 nm), and blue (488.0 nm) excitation, the Raman D and G peaks shift to higher wave numbers as the excitation energy increases. The higher frequency is associated with smaller clusters that are preferentially excited with higher photon energy. It appears that photoluminescence occurs due to radiative recombination from intracluster transitions in Si-alloyed sp2-bonded carbon clusters.

Original languageEnglish (US)
Pages (from-to)768-771
Number of pages4
JournalJournal of Materials Research
Volume18
Issue number4
DOIs
StatePublished - Apr 2003
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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