Abstract
This paper discusses water reclaim opportunities as a viable means of ensuring the future water needs of the microelectronics industry. Escalating factory costs; increased burdens on municipal infrastructure; governmental compliance; an awareness of limited resource availability to sustain a young, rapidly changing industry; a need to control escalating capital costs and investment risk; and the need to deliver new, expanded, and re-equipped semiconductor factories faster underscore the importance of developing a greater understanding and a more widespread implementation of process wastewater reclaim in the semiconductor industry. Water reclaim is important in semiconductor fabrication facilities and is supported by environmental, technology, regulatory, and economic issues. Water reclaim is possible and possesses potential for wide spread implementation in new and existing factory design. It can also be accomplished within the limits of available technologies and can be cost effective when considerations are given to the operational savings inherent in consumption and discharge reduction. In this paper a general water reclaim system is developed with system descriptions, diagrams, and flow analysis for a niche market fab.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World |
| Pages | 701-713 |
| Number of pages | 13 |
| Volume | 278 |
| DOIs | |
| State | Published - 2000 |
| Event | Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World - Orlando, FL, United States Duration: Feb 20 2000 → Feb 22 2000 |
Other
| Other | Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World |
|---|---|
| Country | United States |
| City | Orlando, FL |
| Period | 2/20/00 → 2/22/00 |
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ASJC Scopus subject areas
- Civil and Structural Engineering
- Building and Construction
Cite this
Water reclaim strategies for the microelectronics industry. / Chasey, Allan; Striffler, Ed.
Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World. Vol. 278 2000. p. 701-713.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Water reclaim strategies for the microelectronics industry
AU - Chasey, Allan
AU - Striffler, Ed
PY - 2000
Y1 - 2000
N2 - This paper discusses water reclaim opportunities as a viable means of ensuring the future water needs of the microelectronics industry. Escalating factory costs; increased burdens on municipal infrastructure; governmental compliance; an awareness of limited resource availability to sustain a young, rapidly changing industry; a need to control escalating capital costs and investment risk; and the need to deliver new, expanded, and re-equipped semiconductor factories faster underscore the importance of developing a greater understanding and a more widespread implementation of process wastewater reclaim in the semiconductor industry. Water reclaim is important in semiconductor fabrication facilities and is supported by environmental, technology, regulatory, and economic issues. Water reclaim is possible and possesses potential for wide spread implementation in new and existing factory design. It can also be accomplished within the limits of available technologies and can be cost effective when considerations are given to the operational savings inherent in consumption and discharge reduction. In this paper a general water reclaim system is developed with system descriptions, diagrams, and flow analysis for a niche market fab.
AB - This paper discusses water reclaim opportunities as a viable means of ensuring the future water needs of the microelectronics industry. Escalating factory costs; increased burdens on municipal infrastructure; governmental compliance; an awareness of limited resource availability to sustain a young, rapidly changing industry; a need to control escalating capital costs and investment risk; and the need to deliver new, expanded, and re-equipped semiconductor factories faster underscore the importance of developing a greater understanding and a more widespread implementation of process wastewater reclaim in the semiconductor industry. Water reclaim is important in semiconductor fabrication facilities and is supported by environmental, technology, regulatory, and economic issues. Water reclaim is possible and possesses potential for wide spread implementation in new and existing factory design. It can also be accomplished within the limits of available technologies and can be cost effective when considerations are given to the operational savings inherent in consumption and discharge reduction. In this paper a general water reclaim system is developed with system descriptions, diagrams, and flow analysis for a niche market fab.
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U2 - 10.1061/40475(278)75
DO - 10.1061/40475(278)75
M3 - Conference contribution
SN - 9780784404751
VL - 278
SP - 701
EP - 713
BT - Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World
ER -