Water reclaim strategies for the microelectronics industry

Allan Chasey, Ed Striffler

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper discusses water reclaim opportunities as a viable means of ensuring the future water needs of the microelectronics industry. Escalating factory costs; increased burdens on municipal infrastructure; governmental compliance; an awareness of limited resource availability to sustain a young, rapidly changing industry; a need to control escalating capital costs and investment risk; and the need to deliver new, expanded, and re-equipped semiconductor factories faster underscore the importance of developing a greater understanding and a more widespread implementation of process wastewater reclaim in the semiconductor industry. Water reclaim is important in semiconductor fabrication facilities and is supported by environmental, technology, regulatory, and economic issues. Water reclaim is possible and possesses potential for wide spread implementation in new and existing factory design. It can also be accomplished within the limits of available technologies and can be cost effective when considerations are given to the operational savings inherent in consumption and discharge reduction. In this paper a general water reclaim system is developed with system descriptions, diagrams, and flow analysis for a niche market fab.

    Original languageEnglish (US)
    Title of host publicationProceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World
    Pages701-713
    Number of pages13
    Volume278
    DOIs
    StatePublished - 2000
    EventConstruction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World - Orlando, FL, United States
    Duration: Feb 20 2000Feb 22 2000

    Other

    OtherConstruction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World
    CountryUnited States
    CityOrlando, FL
    Period2/20/002/22/00

    Fingerprint

    Microelectronics
    Industrial plants
    Water
    Industry
    Semiconductor materials
    Environmental technology
    Costs
    Wastewater
    Availability
    Fabrication
    Economics

    ASJC Scopus subject areas

    • Civil and Structural Engineering
    • Building and Construction

    Cite this

    Chasey, A., & Striffler, E. (2000). Water reclaim strategies for the microelectronics industry. In Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World (Vol. 278, pp. 701-713) https://doi.org/10.1061/40475(278)75

    Water reclaim strategies for the microelectronics industry. / Chasey, Allan; Striffler, Ed.

    Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World. Vol. 278 2000. p. 701-713.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Chasey, A & Striffler, E 2000, Water reclaim strategies for the microelectronics industry. in Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World. vol. 278, pp. 701-713, Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World, Orlando, FL, United States, 2/20/00. https://doi.org/10.1061/40475(278)75
    Chasey A, Striffler E. Water reclaim strategies for the microelectronics industry. In Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World. Vol. 278. 2000. p. 701-713 https://doi.org/10.1061/40475(278)75
    Chasey, Allan ; Striffler, Ed. / Water reclaim strategies for the microelectronics industry. Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World. Vol. 278 2000. pp. 701-713
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