Water reclaim strategies for the microelectronics industry

Allan Chasey, Ed Striffler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses water reclaim opportunities as a viable means of ensuring the future water needs of the microelectronics industry. Escalating factory costs; increased burdens on municipal infrastructure; governmental compliance; an awareness of limited resource availability to sustain a young, rapidly changing industry; a need to control escalating capital costs and investment risk; and the need to deliver new, expanded, and re-equipped semiconductor factories faster underscore the importance of developing a greater understanding and a more widespread implementation of process wastewater reclaim in the semiconductor industry. Water reclaim is important in semiconductor fabrication facilities and is supported by environmental, technology, regulatory, and economic issues. Water reclaim is possible and possesses potential for wide spread implementation in new and existing factory design. It can also be accomplished within the limits of available technologies and can be cost effective when considerations are given to the operational savings inherent in consumption and discharge reduction. In this paper a general water reclaim system is developed with system descriptions, diagrams, and flow analysis for a niche market fab.

Original languageEnglish (US)
Title of host publicationProceedings of Construction Congress VI
Subtitle of host publicationBuilding Together for a Better Tomorrow in an Increasingly Complex World
Pages701-713
Number of pages13
DOIs
StatePublished - Dec 1 2000
EventConstruction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World - Orlando, FL, United States
Duration: Feb 20 2000Feb 22 2000

Publication series

NameProceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World
Volume278

Other

OtherConstruction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World
CountryUnited States
CityOrlando, FL
Period2/20/002/22/00

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Building and Construction

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  • Cite this

    Chasey, A., & Striffler, E. (2000). Water reclaim strategies for the microelectronics industry. In Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World (pp. 701-713). (Proceedings of Construction Congress VI: Building Together for a Better Tomorrow in an Increasingly Complex World; Vol. 278). https://doi.org/10.1061/40475(278)75