Variable frequency microwave induced low temperature dopant activation in ion implanted silicon

Terry Alford, Iftikhar Ahmad, Robert Hubbard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Fingerprint

Dive into the research topics of 'Variable frequency microwave induced low temperature dopant activation in ion implanted silicon'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds