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Vapor phase metal-assisted chemical etching of silicon
Owen J. Hildreth, Daniel R. Schmidt
Research output
:
Contribution to journal
›
Article
›
peer-review
28
Scopus citations
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Dive into the research topics of 'Vapor phase metal-assisted chemical etching of silicon'. Together they form a unique fingerprint.
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Engineering & Materials Science
Etching
100%
Vapors
83%
Silicon
73%
Metals
59%
Catalysts
44%
Liquids
35%
Stiction
18%
Substrates
18%
Lithography
14%
Nanoparticles
13%
MEMS
12%
Ions
12%
Temperature
10%
Physics & Astronomy
vapor phases
74%
etching
70%
silicon
49%
catalysts
49%
metals
47%
liquid phases
45%
stiction
19%
bypasses
16%
nonuniformity
13%
microelectromechanical systems
12%
lithography
11%
nanoparticles
8%
temperature
7%
ions
6%
Chemical Compounds
Etching
83%
Micro Porosity
24%
Catalyst
22%
Liquid
21%
Diffusion
8%
Reduction
6%
Ion
5%
Time
4%
Application
4%