Vapor deposition of diamond thin films on various substrates

Y. H. Lee, K. J. Bachmann, J. T. Glass, Y. M. LeGrice, Robert Nemanich

Research output: Contribution to journalArticle

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Abstract

The growth of diamond films on various polycrystalline metal and (001) Si substrates by biased hot-filament chemical vapor deposition is discussed. The deposited films have been characterized by scanning electron microscopy, x-ray diffraction, Auger electron spectroscopy, and Raman spectroscopy. Films grown on Si, Ni, and W exhibited the best quality according to Raman sp 3/sp2 peak intensity ratios and the full width at half maximum of the 1332 cm-1 Raman peak. The relationship between this quality and substrate properties such as surface energy and lattice parameter is discussed. Also, the residual stress in the film as measured by the Raman peak shift is correlated with the thermal expansion coefficient of the substrate.

Original languageEnglish (US)
Pages (from-to)1916-1918
Number of pages3
JournalApplied Physics Letters
Volume57
Issue number18
DOIs
StatePublished - 1990
Externally publishedYes

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diamonds
vapor deposition
thin films
diamond films
Auger spectroscopy
surface energy
residual stress
electron spectroscopy
thermal expansion
lattice parameters
filaments
x ray diffraction
Raman spectroscopy
scanning electron microscopy
shift
coefficients
metals

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Lee, Y. H., Bachmann, K. J., Glass, J. T., LeGrice, Y. M., & Nemanich, R. (1990). Vapor deposition of diamond thin films on various substrates. Applied Physics Letters, 57(18), 1916-1918. https://doi.org/10.1063/1.104011

Vapor deposition of diamond thin films on various substrates. / Lee, Y. H.; Bachmann, K. J.; Glass, J. T.; LeGrice, Y. M.; Nemanich, Robert.

In: Applied Physics Letters, Vol. 57, No. 18, 1990, p. 1916-1918.

Research output: Contribution to journalArticle

Lee, YH, Bachmann, KJ, Glass, JT, LeGrice, YM & Nemanich, R 1990, 'Vapor deposition of diamond thin films on various substrates', Applied Physics Letters, vol. 57, no. 18, pp. 1916-1918. https://doi.org/10.1063/1.104011
Lee, Y. H. ; Bachmann, K. J. ; Glass, J. T. ; LeGrice, Y. M. ; Nemanich, Robert. / Vapor deposition of diamond thin films on various substrates. In: Applied Physics Letters. 1990 ; Vol. 57, No. 18. pp. 1916-1918.
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