Abstract
We report on UV Raman spectroscopy of In xGa 1-xN thin films grown on (0001) sapphire substrates using a specially designed metal-organic chemical vapor deposition (MOCVD) reactor. Eight films were examined in the compositional range 0<×<0.50. Mid and deep-UV Raman spectroscopy was done with the 325.2 nm line of the HeCd laser and the 244 nm line of a double frequency Ar ion laser. The mode behavior of the A 1(LO) and E 2 phonons was also investigated. We have found compelling evidence for one-mode behavior for the A 1(LO) phonon mode, while our data for the E 2 mode deviates from the predictions for one-mode behavior. The results for the A 1(LO) mode are consistent with the previously reported phonon mode behavior in AlGaN alloys. Also, evidence regarding the presence of compositional inhomogeneities and spinodal decomposition in InGaN thin films is presented.
Original language | English (US) |
---|---|
Title of host publication | Materials Research Society Symposium - Proceedings |
Editors | C Wetzel, M Shur, U Mishra, B Gil, K Kishino |
Volume | 639 |
State | Published - 2001 |
Externally published | Yes |
Event | GaN and Related Alloys 2000 - Boston, MA, United States Duration: Nov 27 2000 → Dec 1 2000 |
Other
Other | GaN and Related Alloys 2000 |
---|---|
Country/Territory | United States |
City | Boston, MA |
Period | 11/27/00 → 12/1/00 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials