UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

Maxim S. Komlenok, Anna M. Zaniewski, Evgeny V. Zavedeev, Vitaly I. Konov, Franz A M Koeck, Robert Nemanich

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties. The effect requires multiple pulsed irradiation and results in a decrease of the film electrical conductivity, which is accompanied by optical bleaching of the diamond film absorption

Original languageEnglish (US)
Pages (from-to)196-199
Number of pages4
JournalDiamond and Related Materials
Volume58
DOIs
StatePublished - Sep 29 2015

Fingerprint

Diamond films
ultraviolet lasers
diamond films
Electric properties
Optical properties
electrical properties
optical properties
Lasers
Laser pulses
Graphitization
graphitization
Excimer lasers
bleaching
Bleaching
pulses
Gas mixtures
excimer lasers
lasers
gas mixtures
Chemical vapor deposition

Keywords

  • AFM
  • Conductive nanocrystalline diamond
  • Laser
  • Nanoablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Chemistry(all)

Cite this

UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films. / Komlenok, Maxim S.; Zaniewski, Anna M.; Zavedeev, Evgeny V.; Konov, Vitaly I.; Koeck, Franz A M; Nemanich, Robert.

In: Diamond and Related Materials, Vol. 58, 29.09.2015, p. 196-199.

Research output: Contribution to journalArticle

Komlenok, Maxim S. ; Zaniewski, Anna M. ; Zavedeev, Evgeny V. ; Konov, Vitaly I. ; Koeck, Franz A M ; Nemanich, Robert. / UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films. In: Diamond and Related Materials. 2015 ; Vol. 58. pp. 196-199.
@article{cd1ca3fa5feb4426b5390b655aaa86f2,
title = "UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films",
abstract = "The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties. The effect requires multiple pulsed irradiation and results in a decrease of the film electrical conductivity, which is accompanied by optical bleaching of the diamond film absorption",
keywords = "AFM, Conductive nanocrystalline diamond, Laser, Nanoablation",
author = "Komlenok, {Maxim S.} and Zaniewski, {Anna M.} and Zavedeev, {Evgeny V.} and Konov, {Vitaly I.} and Koeck, {Franz A M} and Robert Nemanich",
year = "2015",
month = "9",
day = "29",
doi = "10.1016/j.diamond.2015.07.009",
language = "English (US)",
volume = "58",
pages = "196--199",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier BV",

}

TY - JOUR

T1 - UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

AU - Komlenok, Maxim S.

AU - Zaniewski, Anna M.

AU - Zavedeev, Evgeny V.

AU - Konov, Vitaly I.

AU - Koeck, Franz A M

AU - Nemanich, Robert

PY - 2015/9/29

Y1 - 2015/9/29

N2 - The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties. The effect requires multiple pulsed irradiation and results in a decrease of the film electrical conductivity, which is accompanied by optical bleaching of the diamond film absorption

AB - The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties. The effect requires multiple pulsed irradiation and results in a decrease of the film electrical conductivity, which is accompanied by optical bleaching of the diamond film absorption

KW - AFM

KW - Conductive nanocrystalline diamond

KW - Laser

KW - Nanoablation

UR - http://www.scopus.com/inward/record.url?scp=84940376292&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84940376292&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2015.07.009

DO - 10.1016/j.diamond.2015.07.009

M3 - Article

VL - 58

SP - 196

EP - 199

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -