UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

Maxim S. Komlenok, Anna M. Zaniewski, Evgeny V. Zavedeev, Vitaly I. Konov, Franz A M Koeck, Robert Nemanich

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties. The effect requires multiple pulsed irradiation and results in a decrease of the film electrical conductivity, which is accompanied by optical bleaching of the diamond film absorption

Original languageEnglish (US)
Pages (from-to)196-199
Number of pages4
JournalDiamond and Related Materials
Volume58
DOIs
StatePublished - Sep 29 2015

Keywords

  • AFM
  • Conductive nanocrystalline diamond
  • Laser
  • Nanoablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

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