UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces

W. C. Yang; H. Ade; R. J. Nemanich

doi:10.1117/12.432507

UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces

W. C. Yang, H. Ade, R. J. Nemanich

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi₂ islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.

Original language	English (US)
Pages (from-to)	168-176
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4274
DOIs	https://doi.org/10.1117/12.432507
State	Published - Jun 29 2001
Externally published	Yes
Event	Laser Applications in Microelectronic and Optoelectronic Manufacturing VI 2001 - San Jose, United States Duration: Jan 20 2001 → Jan 26 2001

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces",

abstract = "The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi2 islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.",

author = "Yang, {W. C.} and H. Ade and Nemanich, {R. J.}",

note = "Funding Information: We gratefully acknowledge the Duke Free Electron Laser Laboratory for access to the OK-4 free electron laser and C. Roland for helpful discussions. This work was supported in part by the NSF under grant DMR 9633547 and the ONR through grant N00014-00-1-0292. Publisher Copyright: {\textcopyright} 2001 SPIE.; Laser Applications in Microelectronic and Optoelectronic Manufacturing VI 2001 ; Conference date: 20-01-2001 Through 26-01-2001",

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doi = "10.1117/12.432507",

language = "English (US)",

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T1 - UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces

AU - Yang, W. C.

AU - Ade, H.

AU - Nemanich, R. J.

N1 - Funding Information: We gratefully acknowledge the Duke Free Electron Laser Laboratory for access to the OK-4 free electron laser and C. Roland for helpful discussions. This work was supported in part by the NSF under grant DMR 9633547 and the ONR through grant N00014-00-1-0292. Publisher Copyright: © 2001 SPIE.

PY - 2001/6/29

Y1 - 2001/6/29

N2 - The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi2 islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.

AB - The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi2 islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.

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SP - 168

EP - 176

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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Y2 - 20 January 2001 through 26 January 2001

ER -

UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces

Abstract

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