TY - JOUR
T1 - Use of silicon nitride in buried contact solar cells
AU - Vogl, Bernhard
AU - Slade, Alexander M.
AU - Pritchard, Stephen C.
AU - Gross, Mark
AU - Honsberg, Christiana B.
AU - Cotter, Jeffrey E.
AU - Wenham, Stuart R.
N1 - Funding Information:
The authors would like to thank Anja Aberle and Hamid Mehrvarz for assistance in processing of test structures. The Photovoltaics Special Research Centre is supported by the Australian Research Council.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2001/2
Y1 - 2001/2
N2 - Silicon nitride offers many potential benefits to the family of buried contact fabrication sequences including improved design flexibility and efficiency. The main device structures of the buried contact family comprise the standard buried contact, the simplified buried contact and the double-sided buried contact cells. The physical properties of silicon nitride allow it to be used for surface passivation, as an anti-reflection coating, as a diffusion source material and as a masking dielectric. The use of silicon nitride in each buried contact fabrication sequence is described in this work.
AB - Silicon nitride offers many potential benefits to the family of buried contact fabrication sequences including improved design flexibility and efficiency. The main device structures of the buried contact family comprise the standard buried contact, the simplified buried contact and the double-sided buried contact cells. The physical properties of silicon nitride allow it to be used for surface passivation, as an anti-reflection coating, as a diffusion source material and as a masking dielectric. The use of silicon nitride in each buried contact fabrication sequence is described in this work.
UR - http://www.scopus.com/inward/record.url?scp=0035254339&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035254339&partnerID=8YFLogxK
U2 - 10.1016/S0927-0248(00)00153-7
DO - 10.1016/S0927-0248(00)00153-7
M3 - Article
AN - SCOPUS:0035254339
SN - 0927-0248
VL - 66
SP - 17
EP - 25
JO - Solar Energy Materials and Solar Cells
JF - Solar Energy Materials and Solar Cells
IS - 1-4
ER -