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Use of plasma enhanced ALD to construct efficient interference filters for astronomy in the FUV
Paul Scowen, Robert Nemanich, Brianna Eller, Hongbin Yu, Tom Mooney, Matt Beasley
- Earth and Space Exploration, School of (SESE)
- Physics
- Photonics Innovation, Center for (CPhI)
- Connection One (C1)
- Electrical, Computer, and Energy Engineering, School of (IAFSE-ECEE)
- Sustainability Initiative
- Electrical Engineering
- Nano-Electronics, Arizona Institute of (AINE)
- Solid State Electronics Research Center (CSSER)
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Scopus
citations