Uniform and Repeatable Cold-Wall Chemical Vapor Deposition Synthesis of Single-Layer MoS₂

Physics & Astronomy

• cold walls 100%
• vapor deposition 55%
• synthesis 52%
• Auger spectroscopy 47%
• electron spectroscopy 46%
• scanning electron microscopy 31%
• thick films 22%
• gas flow 21%
• deposits 21%
• backscattering 21%
• flow velocity 19%
• temperature 14%
• spectroscopy 12%

Engineering & Materials Science

• Chemical vapor deposition 83%
• Auger electron spectroscopy 56%
• Substrates 38%
• Rutherford backscattering spectroscopy 33%
• Scanning electron microscopy 28%
• Spectrometry 23%
• Deposits 17%
• Flow of gases 17%
• Temperature 14%
• Flow rate 13%
• Chemical analysis 11%

Chemical Compounds

• Chemical Vapour Deposition 64%
• Auger Electron Spectroscopy 40%
• Liquid Film 34%
• Rutherford Backscattering Spectroscopy 22%
• Scanning Electron Microscopy 21%
• Amount 15%
• Flow Kinetics 13%
• Chemical Element 13%
• Molecular Cluster 11%
• Pressure 10%