Ultrathin cobalt silicide layers formed by rapid thermal processing of metal on amorphous silicon

A. H M Kamal, M. J. Rack, Michael Kozicki, D. K. Ferry, J. Lützen, J. A. Hallmark

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The formation of thin (<15 nm) cobalt silicide layers on amorphous silicon (a-Si) has been investigated as a part of a program involving the fabrication of poly-Si-based single electron transistors. Rapid thermal annealing was used to promote the reaction between the a-Si and cobalt metal films. The effects of three most important factors on silicide formation during annealing (temperature, temperature ramp rate, and anneal time) were studied using both electrical (sheet resistance) and surface analysis (Auger electron spectroscopy) techniques. In particular, the impact of temperature ramp rate on silicide formation has been addressed. The optimization of the thin suicide process has been achieved by a statistical analysis. Transmission electron microscopy cross-sectional analysis has been performed to determine the thickness of the film.

Original languageEnglish (US)
Pages (from-to)899-902
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number4
StatePublished - Jul 1997

Fingerprint

Rapid thermal processing
Amorphous silicon
amorphous silicon
Cobalt
cobalt
ramps
Metals
metals
Single electron transistors
single electron transistors
annealing
Rapid thermal annealing
Sheet resistance
Surface analysis
Auger electron spectroscopy
metal films
Polysilicon
statistical analysis
Temperature
Auger spectroscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Ultrathin cobalt silicide layers formed by rapid thermal processing of metal on amorphous silicon. / Kamal, A. H M; Rack, M. J.; Kozicki, Michael; Ferry, D. K.; Lützen, J.; Hallmark, J. A.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 15, No. 4, 07.1997, p. 899-902.

Research output: Contribution to journalArticle

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