Abstract

We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 x 2 array emits up to 34.6 dB SPL at 1 cm distance.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages1193-1196
Number of pages4
DOIs
StatePublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: Jan 29 2012Feb 2 2012

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period1/29/122/2/12

Fingerprint

Electrostatic actuators
ultrasonics
actuators
Ultrasonics
Acoustic waves
diaphragms
electrostatics
sound pressure
Diaphragms
Substrates
Actuators
Inspection equipment
Ultrasonic waves
Polyethylene
ultrasonic radiation
microelectromechanical systems
MEMS
Polyethylenes
polyethylenes
inspection

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Kim, S., Zhang, X., Daugherty, R., Lee, E., Kunnen, G., Allee, D., ... Chae, J. (2012). Ultrasonic electrostatic actuators on a flexible substrate. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1193-1196). [6170377] https://doi.org/10.1109/MEMSYS.2012.6170377

Ultrasonic electrostatic actuators on a flexible substrate. / Kim, Sangpyeong; Zhang, Xu; Daugherty, Robin; Lee, Ed; Kunnen, George; Allee, David; Forsythe, Eric; Chae, Junseok.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1193-1196 6170377.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, S, Zhang, X, Daugherty, R, Lee, E, Kunnen, G, Allee, D, Forsythe, E & Chae, J 2012, Ultrasonic electrostatic actuators on a flexible substrate. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 6170377, pp. 1193-1196, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 1/29/12. https://doi.org/10.1109/MEMSYS.2012.6170377
Kim S, Zhang X, Daugherty R, Lee E, Kunnen G, Allee D et al. Ultrasonic electrostatic actuators on a flexible substrate. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1193-1196. 6170377 https://doi.org/10.1109/MEMSYS.2012.6170377
Kim, Sangpyeong ; Zhang, Xu ; Daugherty, Robin ; Lee, Ed ; Kunnen, George ; Allee, David ; Forsythe, Eric ; Chae, Junseok. / Ultrasonic electrostatic actuators on a flexible substrate. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. pp. 1193-1196
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