Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator

Wei Pang, Le Yan, Hao Zhang, Hongyu Yu, Eun Sok Kim, William C. Tang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10 -15 g in air at room temperature. The resonator with size of about 200×50×1μm 3 has a quality factor (Q) of >1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability corresponds to a mass uncertainty of only about 4.6fg. We have experimentally demonstrated a minimum detectable frequency shift of about ∼1.6ppm due to an absorption of isopropanol vapor (73 fg) on the sidewalls of the parylenecoated LEM piezoelectric resonator.

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages78-81
Number of pages4
StatePublished - 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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