Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator

Wei Pang, Le Yan, Hao Zhang, Hongyu Yu, Eun Sok Kim, William C. Tang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10 -15 g in air at room temperature. The resonator with size of about 200×50×1μm 3 has a quality factor (Q) of >1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability corresponds to a mass uncertainty of only about 4.6fg. We have experimentally demonstrated a minimum detectable frequency shift of about ∼1.6ppm due to an absorption of isopropanol vapor (73 fg) on the sidewalls of the parylenecoated LEM piezoelectric resonator.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages78-81
Number of pages4
Volume2006
StatePublished - 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

Fingerprint

Resonators
Sensors
Natural frequencies
Vapors
Air
Temperature
Uncertainty

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Pang, W., Yan, L., Zhang, H., Yu, H., Kim, E. S., & Tang, W. C. (2006). Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 2006, pp. 78-81). [1627740]

Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator. / Pang, Wei; Yan, Le; Zhang, Hao; Yu, Hongyu; Kim, Eun Sok; Tang, William C.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. p. 78-81 1627740.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pang, W, Yan, L, Zhang, H, Yu, H, Kim, ES & Tang, WC 2006, Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). vol. 2006, 1627740, pp. 78-81, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 1/22/06.
Pang W, Yan L, Zhang H, Yu H, Kim ES, Tang WC. Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006. 2006. p. 78-81. 1627740
Pang, Wei ; Yan, Le ; Zhang, Hao ; Yu, Hongyu ; Kim, Eun Sok ; Tang, William C. / Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. pp. 78-81
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