@inproceedings{f6949c57a8324bb5b846bcba70a7ca40,
title = "Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator",
abstract = "This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10 -15 g in air at room temperature. The resonator with size of about 200×50×1μm 3 has a quality factor (Q) of >1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability corresponds to a mass uncertainty of only about 4.6fg. We have experimentally demonstrated a minimum detectable frequency shift of about ∼1.6ppm due to an absorption of isopropanol vapor (73 fg) on the sidewalls of the parylenecoated LEM piezoelectric resonator.",
author = "Wei Pang and Le Yan and Hao Zhang and Hongyu Yu and Kim, {Eun Sok} and Tang, {William C.}",
year = "2006",
language = "English (US)",
isbn = "0780394755",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "78--81",
booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",
note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",
}