Transport issues in focused electron beam chemical vapor deposition

Engineering & Materials Science

• Electron beams 100%
• Chemical vapor deposition 98%
• Electrons 85%
• Molecules 82%
• Deposits 62%
• Nanostructures 51%
• Substrates 44%
• Surface diffusion 32%
• Advection 26%
• Energy transfer 24%
• Heat conduction 21%
• Conservation 20%
• Mass transfer 18%
• Heating 15%
• Heat transfer 14%

Physics & Astronomy

• vapor deposition 64%
• electron beams 60%
• deposits 57%
• molecules 45%
• electrons 35%
• Boltzmann transport equation 26%
• impingement 24%
• conservation equations 24%
• advection 24%
• surface diffusion 23%
• conductive heat transfer 20%
• mass transfer 19%
• energy transfer 17%
• interactions 16%
• heat transfer 16%
• heating 13%
• kinetics 12%
• energy 6%

Chemical Compounds

• Electron Beam 91%
• Chemical Vapour Deposition 75%
• Electron Particle 45%
• Molecule 29%
• Transport Phenomena 26%
• Nanomaterial 26%
• Surface Diffusion 26%
• Vapor Deposition Process 25%
• Deposition Process 22%
• Heat Transfer 22%
• Thermal Conductivity 19%
• Mass Transfer 17%
• Shape 13%
• Surface 13%
• Pressure 12%
• Time 7%