TY - GEN
T1 - Tittanium dioxide film as a phosphorus diffusion barrier in silicon solar cells
AU - Ueranantasun, Attachai
AU - Richards, Bryce S.
AU - Honsberg, Christiana B.
AU - Cotter, Jeffrey E.
PY - 2003/12/1
Y1 - 2003/12/1
N2 - The application of titanium dioxide (TiO2) films as a phosphorus diffusion barrier is investigated. The purpose is to study the possibility of using TiO2 to replace thermally grown silicon dioxide (SiO 2) as a phosphorus diffusion barrier to allow the formation of a selective emitter in the buried contact (BC) solar cell processing. The TiO 2 films are deposited on silicon wafers at 450°C before phosphorus (POCl3) diffusion. The result shows that TiO2 is a potential diffusion barrier, as the resistivity under the masked regions is as high as 800 Omega;?/sq. However, the scanning electron microscopic (SEM) images reveal that there is a significant change in surface morphology of the films when phosphorus is involved in the process. This morphology change compared to other sintering gases is also discussed.
AB - The application of titanium dioxide (TiO2) films as a phosphorus diffusion barrier is investigated. The purpose is to study the possibility of using TiO2 to replace thermally grown silicon dioxide (SiO 2) as a phosphorus diffusion barrier to allow the formation of a selective emitter in the buried contact (BC) solar cell processing. The TiO 2 films are deposited on silicon wafers at 450°C before phosphorus (POCl3) diffusion. The result shows that TiO2 is a potential diffusion barrier, as the resistivity under the masked regions is as high as 800 Omega;?/sq. However, the scanning electron microscopic (SEM) images reveal that there is a significant change in surface morphology of the films when phosphorus is involved in the process. This morphology change compared to other sintering gases is also discussed.
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M3 - Conference contribution
AN - SCOPUS:6344282942
SN - 4990181603
SN - 9784990181604
T3 - Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion
SP - 1411
EP - 1414
BT - Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion
A2 - Kurokawa, K.
A2 - Kazmerski, L.L.
A2 - McNeils, B.
A2 - Yamaguchi, M.
A2 - Wronski, C.
T2 - Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion
Y2 - 11 May 2003 through 18 May 2003
ER -