Titanium germanosilicide: phase formation, segregation, and morphology

D. B. Aldrich, Y. L. Chen, D. E. Sayers, Robert Nemanich

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

The high temperature solid phase reaction of Ti with SixGe1-x produces a low resistivity titanium germanosilicide which is isomorphic with the C54 phase of TiSi2 and TiGe2. The composition of the final C54 Ti(SiyGe1-y)2 film is dependent on the composition of the initial Si-Ge alloy and on the annealing conditions. The intermediate phases of the Ti-Si and Ti-Ge reactions are C49 TiSi2 and Ti6Ge5 respectively. The reaction path of Ti - SixGe1-x shifts from that of Ti-Si to that of Ti-Ge as the SixGe1-x alloy composition changes (x=1→0). Phase separations were observed at low temperatures for Ti reactions with Si-Ge alloys and the C54 formation temperature was observed to decrease as the Si-Ge alloy composition approached Si.5Ge.5. Surface and interface morphologies were examined using SEM and TEM. The formation of smooth, large grain, low resistivity films has been observed for the reaction of Ti with low Ge content alloys (x≥0.7). As germanium content is increased the formation of faceted islands is observed. Reactions with high Ge content alloys (x≤0.3) produce films with morphologies similar to those of the Ti-Ge reaction.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsRobert W. Fathauer, Siegfried Mantl, Leo J. Schowalter, K.N. Tu
Place of PublicationPittsburgh, PA, United States
PublisherPubl by Materials Research Society
Pages305-310
Number of pages6
Volume320
ISBN (Print)1558992197
StatePublished - 1994
Externally publishedYes
EventProceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 29 1993Dec 2 1993

Other

OtherProceedings of the 1993 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/29/9312/2/93

Fingerprint

Titanium
Chemical analysis
Germanium
Phase separation
Temperature
Annealing
Transmission electron microscopy
Scanning electron microscopy
Si-Ge alloys

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Aldrich, D. B., Chen, Y. L., Sayers, D. E., & Nemanich, R. (1994). Titanium germanosilicide: phase formation, segregation, and morphology. In R. W. Fathauer, S. Mantl, L. J. Schowalter, & K. N. Tu (Eds.), Materials Research Society Symposium Proceedings (Vol. 320, pp. 305-310). Pittsburgh, PA, United States: Publ by Materials Research Society.

Titanium germanosilicide : phase formation, segregation, and morphology. / Aldrich, D. B.; Chen, Y. L.; Sayers, D. E.; Nemanich, Robert.

Materials Research Society Symposium Proceedings. ed. / Robert W. Fathauer; Siegfried Mantl; Leo J. Schowalter; K.N. Tu. Vol. 320 Pittsburgh, PA, United States : Publ by Materials Research Society, 1994. p. 305-310.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aldrich, DB, Chen, YL, Sayers, DE & Nemanich, R 1994, Titanium germanosilicide: phase formation, segregation, and morphology. in RW Fathauer, S Mantl, LJ Schowalter & KN Tu (eds), Materials Research Society Symposium Proceedings. vol. 320, Publ by Materials Research Society, Pittsburgh, PA, United States, pp. 305-310, Proceedings of the 1993 Fall Meeting of the Materials Research Society, Boston, MA, USA, 11/29/93.
Aldrich DB, Chen YL, Sayers DE, Nemanich R. Titanium germanosilicide: phase formation, segregation, and morphology. In Fathauer RW, Mantl S, Schowalter LJ, Tu KN, editors, Materials Research Society Symposium Proceedings. Vol. 320. Pittsburgh, PA, United States: Publ by Materials Research Society. 1994. p. 305-310
Aldrich, D. B. ; Chen, Y. L. ; Sayers, D. E. ; Nemanich, Robert. / Titanium germanosilicide : phase formation, segregation, and morphology. Materials Research Society Symposium Proceedings. editor / Robert W. Fathauer ; Siegfried Mantl ; Leo J. Schowalter ; K.N. Tu. Vol. 320 Pittsburgh, PA, United States : Publ by Materials Research Society, 1994. pp. 305-310
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