Time-optimal control for re-entrant semiconductor fabrication lines

Boris G. Zaslavsky, Armando Rodriguez, Donald W. Collins

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper addresses the problem of determining time-optimal resource allocation schedules for re-entrant semiconductor manufacturing lines. More specifically, a solution is presented for the problem of determining a product (start) release schedule and machine work schedules such that the buffer levels are driven from a given initial state to a final desired state in minimum time. The development is based upon widely used flow models. Algorithms are presented for determining the optimal reachability time and an admissible time-optimal scheduling policy.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Conference on Decision and Control
PublisherIEEE
Pages102-107
Number of pages6
Volume1
StatePublished - 1997
EventProceedings of the 1997 36th IEEE Conference on Decision and Control. Part 1 (of 5) - San Diego, CA, USA
Duration: Dec 10 1997Dec 12 1997

Other

OtherProceedings of the 1997 36th IEEE Conference on Decision and Control. Part 1 (of 5)
CitySan Diego, CA, USA
Period12/10/9712/12/97

Fingerprint

Resource allocation
Buffers
Scheduling
Semiconductor materials
Fabrication

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

Cite this

Zaslavsky, B. G., Rodriguez, A., & Collins, D. W. (1997). Time-optimal control for re-entrant semiconductor fabrication lines. In Proceedings of the IEEE Conference on Decision and Control (Vol. 1, pp. 102-107). IEEE.

Time-optimal control for re-entrant semiconductor fabrication lines. / Zaslavsky, Boris G.; Rodriguez, Armando; Collins, Donald W.

Proceedings of the IEEE Conference on Decision and Control. Vol. 1 IEEE, 1997. p. 102-107.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zaslavsky, BG, Rodriguez, A & Collins, DW 1997, Time-optimal control for re-entrant semiconductor fabrication lines. in Proceedings of the IEEE Conference on Decision and Control. vol. 1, IEEE, pp. 102-107, Proceedings of the 1997 36th IEEE Conference on Decision and Control. Part 1 (of 5), San Diego, CA, USA, 12/10/97.
Zaslavsky BG, Rodriguez A, Collins DW. Time-optimal control for re-entrant semiconductor fabrication lines. In Proceedings of the IEEE Conference on Decision and Control. Vol. 1. IEEE. 1997. p. 102-107
Zaslavsky, Boris G. ; Rodriguez, Armando ; Collins, Donald W. / Time-optimal control for re-entrant semiconductor fabrication lines. Proceedings of the IEEE Conference on Decision and Control. Vol. 1 IEEE, 1997. pp. 102-107
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