Fingerprint
Dive into the research topics of 'Three-dimensional topography simulation for deposition and etching processes using a level set method'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Three-dimensional topography simulation for deposition and etching processes using a level set method
A. Sheikholeslami, C. Heitzinger, T. Grasser, S. Selberherr
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations