Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy

B. J. Rodriguez, A. Gruverman, A. I. Kingon, Robert Nemanich, J. S. Cross

Research output: Contribution to journalArticle

81 Citations (Scopus)

Abstract

A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

Original languageEnglish (US)
Pages (from-to)1958-1962
Number of pages5
JournalJournal of Applied Physics
Volume95
Issue number4
DOIs
StatePublished - Feb 15 2004
Externally publishedYes

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capacitors
pulse frequency modulation
microscopy
high resolution
polarization
grain size
thin films

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy. / Rodriguez, B. J.; Gruverman, A.; Kingon, A. I.; Nemanich, Robert; Cross, J. S.

In: Journal of Applied Physics, Vol. 95, No. 4, 15.02.2004, p. 1958-1962.

Research output: Contribution to journalArticle

@article{70688543b3a643c8aab3eb1eb2535450,
title = "Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy",
abstract = "A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.",
author = "Rodriguez, {B. J.} and A. Gruverman and Kingon, {A. I.} and Robert Nemanich and Cross, {J. S.}",
year = "2004",
month = "2",
day = "15",
doi = "10.1063/1.1638889",
language = "English (US)",
volume = "95",
pages = "1958--1962",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "4",

}

TY - JOUR

T1 - Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy

AU - Rodriguez, B. J.

AU - Gruverman, A.

AU - Kingon, A. I.

AU - Nemanich, Robert

AU - Cross, J. S.

PY - 2004/2/15

Y1 - 2004/2/15

N2 - A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

AB - A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

UR - http://www.scopus.com/inward/record.url?scp=1542336939&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542336939&partnerID=8YFLogxK

U2 - 10.1063/1.1638889

DO - 10.1063/1.1638889

M3 - Article

AN - SCOPUS:1542336939

VL - 95

SP - 1958

EP - 1962

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 4

ER -