A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.
ASJC Scopus subject areas
- Physics and Astronomy(all)