Thermodynamics of amorphous SiN(O)H dielectric films synthesized by plasma-enhanced chemical vapor deposition

Jiewei Chen, Min Niu, Jason Calvin, Megan Asplund, Sean W. King, Brian F. Woodfield, Alexandra Navrotsky

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

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Chemical Compounds

Engineering & Materials Science