Fingerprint
Dive into the research topics of 'Thermodynamic Stability of Low-k Amorphous SiOCH Dielectric Films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Thermodynamic Stability of Low-k Amorphous SiOCH Dielectric Films
Jiewei Chen, Sean W. King, Elayaraja Muthuswamy, Anastasia Koryttseva, Di Wu, Alexandra Navrotsky, R. Riedel
Research output: Contribution to journal › Article › peer-review
29
Scopus
citations