Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

W. A. Tiller, S. Hahn, F. A. Ponce

Research output: Contribution to journalArticle

94 Scopus citations

Abstract

Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.

Original languageEnglish (US)
Pages (from-to)3255-3266
Number of pages12
JournalJournal of Applied Physics
Volume59
Issue number9
DOIs
StatePublished - Dec 1 1986
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon'. Together they form a unique fingerprint.

  • Cite this