Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

W. A. Tiller; S. Hahn; F. A. Ponce

doi:10.1063/1.336908

Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

W. A. Tiller, S. Hahn, F. A. Ponce

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99 Scopus citations

Abstract

Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.

Original language	English (US)
Pages (from-to)	3255-3266
Number of pages	12
Journal	Journal of Applied Physics
Volume	59
Issue number	9
DOIs	https://doi.org/10.1063/1.336908
State	Published - 1986
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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title = "Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon",

abstract = "Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.",

author = "Tiller, {W. A.} and S. Hahn and Ponce, {F. A.}",

year = "1986",

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T1 - Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

AU - Tiller, W. A.

AU - Hahn, S.

AU - Ponce, F. A.

PY - 1986

Y1 - 1986

N2 - Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.

AB - Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.

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JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

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Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

Abstract

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