Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon

W. A. Tiller, S. Hahn, Fernando Ponce

Research output: Contribution to journalArticle

94 Citations (Scopus)

Abstract

Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.

Original languageEnglish (US)
Pages (from-to)3255-3266
Number of pages12
JournalJournal of Applied Physics
Volume59
Issue number9
DOIs
StatePublished - 1986
Externally publishedYes

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silicon dioxide
thermodynamics
precipitates
kinetics
silicon
coesite
Frenkel defects
polyhedrons
rods
oxides
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon. / Tiller, W. A.; Hahn, S.; Ponce, Fernando.

In: Journal of Applied Physics, Vol. 59, No. 9, 1986, p. 3255-3266.

Research output: Contribution to journalArticle

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