THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.

F. A. Ponce, S. Hahn, T. Yamashita, M. Scott, J. R. Carruthers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations
Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
PublisherInst of Physics
Pages65-70
Number of pages6
Edition67
ISBN (Print)0854981586
StatePublished - 1983
Externally publishedYes

Publication series

NameInstitute of Physics Conference Series
Number67
ISSN (Print)0373-0751

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this