@inproceedings{9b7195a9502d46fd9c9d625f6b782cda,
title = "THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.",
author = "Ponce, {F. A.} and S. Hahn and T. Yamashita and M. Scott and Carruthers, {J. R.}",
year = "1983",
month = dec,
day = "1",
language = "English (US)",
isbn = "0854981586",
series = "Institute of Physics Conference Series",
publisher = "Inst of Physics",
number = "67",
pages = "65--70",
booktitle = "Institute of Physics Conference Series",
edition = "67",
}