Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids

Xu Zhang; Wencheng Xu; Abbas Abbaspour Tamijani; Junseok Chae

doi:10.1109/MEMSYS.2009.4805539

Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids

Xu Zhang, Wencheng Xu, Abbas Abbaspour Tamijani, Junseok Chae

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8x greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic channels with heights comparable to the acoustic wavelength in FBAR. In order to achieve temperature stability in the highly sensitive FBAR sensor, we analyze sources of thermal effects and characterize FBAR in a Pierce oscillator. Measurements show a temperature coefficient of oscillation frequency (TCF) of -112 ppm/K for the uncompensated circuit. We show that this thermal drift can be reduced to less than lppm/K by applying a properly chosen bias to the oscillator, which suggests the possibility of a feedback approach to achieve thermal stability.

Original language	English (US)
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	939-942
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805539
State	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

Other

Other	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Country/Territory	Italy
City	Sorrento
Period	1/25/09 → 1/29/09

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

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10.1109/MEMSYS.2009.4805539

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Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids. / Zhang, Xu; Xu, Wencheng; Tamijani, Abbas Abbaspour et al.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 939-942 4805539.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhang, X, Xu, W, Tamijani, AA & Chae, J 2009, Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4805539, pp. 939-942, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 1/25/09. https://doi.org/10.1109/MEMSYS.2009.4805539

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abstract = "This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8x greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic channels with heights comparable to the acoustic wavelength in FBAR. In order to achieve temperature stability in the highly sensitive FBAR sensor, we analyze sources of thermal effects and characterize FBAR in a Pierce oscillator. Measurements show a temperature coefficient of oscillation frequency (TCF) of -112 ppm/K for the uncompensated circuit. We show that this thermal drift can be reduced to less than lppm/K by applying a properly chosen bias to the oscillator, which suggests the possibility of a feedback approach to achieve thermal stability.",

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PY - 2009

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AB - This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8x greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic channels with heights comparable to the acoustic wavelength in FBAR. In order to achieve temperature stability in the highly sensitive FBAR sensor, we analyze sources of thermal effects and characterize FBAR in a Pierce oscillator. Measurements show a temperature coefficient of oscillation frequency (TCF) of -112 ppm/K for the uncompensated circuit. We show that this thermal drift can be reduced to less than lppm/K by applying a properly chosen bias to the oscillator, which suggests the possibility of a feedback approach to achieve thermal stability.

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Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids

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