THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP.

J. D. Oberstar, H. Shichijo, M. Keever, B. G. Streetman, J. E. Baker, Peter Williams

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

For light mass projectile implantations of InP that are highly dominated by electronic stopping, the standard Gaussian approximation provides a poor fit to the observed experimental profile. Using four moments based on theoretical considerations profiles using a terminated Edgeworth and Pearson I distribution have ben constructed. It is found that Edgeworth and Pearson I distributions constructed with four moments derived from theoretical values are not significant improvements over the standard LSS Gaussian. The moments of the experimental profiles have therefore been empirically determined. These moments together with the Person IV distribution are shown to fit experimental profiles over at least two orders of magnitude.

Original languageEnglish (US)
Pages (from-to)109-116
Number of pages8
JournalRadiation Effects
Volume61
Issue number1-2
StatePublished - Apr 1982
Externally publishedYes

Fingerprint

Ion implantation
ion implantation
moments
Projectiles
profiles
large-scale structure of the universe
stopping
projectiles
implantation
approximation
electronics

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Oberstar, J. D., Shichijo, H., Keever, M., Streetman, B. G., Baker, J. E., & Williams, P. (1982). THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP. Radiation Effects, 61(1-2), 109-116.

THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP. / Oberstar, J. D.; Shichijo, H.; Keever, M.; Streetman, B. G.; Baker, J. E.; Williams, Peter.

In: Radiation Effects, Vol. 61, No. 1-2, 04.1982, p. 109-116.

Research output: Contribution to journalArticle

Oberstar, JD, Shichijo, H, Keever, M, Streetman, BG, Baker, JE & Williams, P 1982, 'THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP.', Radiation Effects, vol. 61, no. 1-2, pp. 109-116.
Oberstar JD, Shichijo H, Keever M, Streetman BG, Baker JE, Williams P. THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP. Radiation Effects. 1982 Apr;61(1-2):109-116.
Oberstar, J. D. ; Shichijo, H. ; Keever, M. ; Streetman, B. G. ; Baker, J. E. ; Williams, Peter. / THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP. In: Radiation Effects. 1982 ; Vol. 61, No. 1-2. pp. 109-116.
@article{974fbab308e84190a3dacefe20ea32fa,
title = "THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP.",
abstract = "For light mass projectile implantations of InP that are highly dominated by electronic stopping, the standard Gaussian approximation provides a poor fit to the observed experimental profile. Using four moments based on theoretical considerations profiles using a terminated Edgeworth and Pearson I distribution have ben constructed. It is found that Edgeworth and Pearson I distributions constructed with four moments derived from theoretical values are not significant improvements over the standard LSS Gaussian. The moments of the experimental profiles have therefore been empirically determined. These moments together with the Person IV distribution are shown to fit experimental profiles over at least two orders of magnitude.",
author = "Oberstar, {J. D.} and H. Shichijo and M. Keever and Streetman, {B. G.} and Baker, {J. E.} and Peter Williams",
year = "1982",
month = "4",
language = "English (US)",
volume = "61",
pages = "109--116",
journal = "Radiation Effects and Defects in Solids",
issn = "1042-0150",
publisher = "Taylor and Francis Ltd.",
number = "1-2",

}

TY - JOUR

T1 - THEORETICAL AND EMPIRICAL DISTRIBUTIONS FOR ION IMPLANTATION PROFILES IN InP.

AU - Oberstar, J. D.

AU - Shichijo, H.

AU - Keever, M.

AU - Streetman, B. G.

AU - Baker, J. E.

AU - Williams, Peter

PY - 1982/4

Y1 - 1982/4

N2 - For light mass projectile implantations of InP that are highly dominated by electronic stopping, the standard Gaussian approximation provides a poor fit to the observed experimental profile. Using four moments based on theoretical considerations profiles using a terminated Edgeworth and Pearson I distribution have ben constructed. It is found that Edgeworth and Pearson I distributions constructed with four moments derived from theoretical values are not significant improvements over the standard LSS Gaussian. The moments of the experimental profiles have therefore been empirically determined. These moments together with the Person IV distribution are shown to fit experimental profiles over at least two orders of magnitude.

AB - For light mass projectile implantations of InP that are highly dominated by electronic stopping, the standard Gaussian approximation provides a poor fit to the observed experimental profile. Using four moments based on theoretical considerations profiles using a terminated Edgeworth and Pearson I distribution have ben constructed. It is found that Edgeworth and Pearson I distributions constructed with four moments derived from theoretical values are not significant improvements over the standard LSS Gaussian. The moments of the experimental profiles have therefore been empirically determined. These moments together with the Person IV distribution are shown to fit experimental profiles over at least two orders of magnitude.

UR - http://www.scopus.com/inward/record.url?scp=0020117693&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020117693&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0020117693

VL - 61

SP - 109

EP - 116

JO - Radiation Effects and Defects in Solids

JF - Radiation Effects and Defects in Solids

SN - 1042-0150

IS - 1-2

ER -