The sensitivity of radiation-induced leakage to STI topology and sidewall doping

Nadia Rezzak, Michael L. Alles, Ronald D. Schrimpf, Sarah Kalemeris, Lloyd W. Massengill, John Sochacki, Hugh Barnaby

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'The sensitivity of radiation-induced leakage to STI topology and sidewall doping'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds