Abstract

Thin layers of indium tin oxide (ITO) were deposited onto glass substrates by RF magnetron sputtering with the pressure varying from 6 mTorr to 15 mTorr. The films were annealed in a reducing atmosphere at 500 °C for 30 minutes. Sheet resistance was determined by four-point-probe measurement. Resistivity, mobility, and carrier concentration were obtained by Hall effect measurements. Transmission of the films in the visible spectrum was determined by photospectrometry. The structure of the films was characterized by X-ray diffraction. X-ray photoelectron spectroscopy was used to determine the oxidation state of Sn, which was used to determine the fraction of active tin clusters. The effect of additional anneals was investigated. The results reveal that the lowest resistivity obtained was 1.69×10-4 Ω-cm at 9 mTorr and the highest transmittance of 90% was obtained after a second anneal. However, the second anneal decreased the mobility and conductivity for high sputter pressures.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages265-276
Number of pages12
Volume1257
StatePublished - 2010
Event2010 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 5 2010Apr 9 2010

Other

Other2010 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/5/104/9/10

Fingerprint

Tin oxides
indium oxides
Indium
tin oxides
Electric properties
Optical properties
electrical properties
optical properties
Glass
glass
electrical resistivity
Tin
Sheet resistance
Hall effect
visible spectrum
Magnetron sputtering
Carrier concentration
tin
transmittance
magnetron sputtering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Elhalawaty, S., Sivaramakrishnan, K., Theodore, N. D., & Alford, T. (2010). The role of sputter pressure in influencing electrical and optical properties of ITO on glass. In Materials Research Society Symposium Proceedings (Vol. 1257, pp. 265-276)

The role of sputter pressure in influencing electrical and optical properties of ITO on glass. / Elhalawaty, S.; Sivaramakrishnan, K.; Theodore, N. D.; Alford, Terry.

Materials Research Society Symposium Proceedings. Vol. 1257 2010. p. 265-276.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Elhalawaty, S, Sivaramakrishnan, K, Theodore, ND & Alford, T 2010, The role of sputter pressure in influencing electrical and optical properties of ITO on glass. in Materials Research Society Symposium Proceedings. vol. 1257, pp. 265-276, 2010 MRS Spring Meeting, San Francisco, CA, United States, 4/5/10.
Elhalawaty S, Sivaramakrishnan K, Theodore ND, Alford T. The role of sputter pressure in influencing electrical and optical properties of ITO on glass. In Materials Research Society Symposium Proceedings. Vol. 1257. 2010. p. 265-276
Elhalawaty, S. ; Sivaramakrishnan, K. ; Theodore, N. D. ; Alford, Terry. / The role of sputter pressure in influencing electrical and optical properties of ITO on glass. Materials Research Society Symposium Proceedings. Vol. 1257 2010. pp. 265-276
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