The nucleation stage in electron beam induced deposition

C. W. Hagen, W. F. Van Dorp, Peter Crozier

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

With electron beam induced deposition structures as small as 1 nm can be deposited. The nucleation stage of the growth of such deposits is studied in dependence of the substrate material and substrate temperature. On amorphous carbon foils larger deposit sizes are obtained at higher substrate temperatures during growth. On SiN membranes unusually high growth rates are observed which seem to relate to charging effects.

Original languageEnglish (US)
Article number012025
JournalJournal of Physics: Conference Series
Volume126
DOIs
StatePublished - Jan 1 2008

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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