The impact of stress-induced defects on MOS electrostatics and short-channel effects

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4 Scopus citations

Abstract

This paper investigates the influence of stress-induced oxide-trapped charge and interface traps on the electrostatics of metal-oxide-semiconductor (MOS) devices and its relation to short-channel effects (SCE). Interface trap and oxide-trapped charge densities are included in the derivation of scaling models that are based on solving Poisson's equation in the depletion approximation (i.e., in weak inversion) using analytical approximations for the electrostatic potential. The impact of interface traps and oxide-trapped charge on the electrostatic potential profile, scaling, and short-channel effects are modeled analytically and verified with TCAD simulations. The theory and modeling approach is validated through comparisons with the experimental extraction of SCE in n-channel MOS field-effect transistors (MOSFETs) measured before and after hot-carrier stress.

Original languageEnglish (US)
Pages (from-to)167-172
Number of pages6
JournalSolid-State Electronics
Volume103
DOIs
StatePublished - Jan 2015
Externally publishedYes

Keywords

  • Interface traps
  • MOS electrostatics
  • Oxide-trapped charge
  • Reliability
  • Scaling length
  • Short-channel effects

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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