The fabrication of nickel and chromium suicide using an XeCl excimer laser

C. J. Barbero, C. Deng, T. W. Sigmon, S. W. Russell, Terry Alford

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 Å by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm2, and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi2 and CrSi2 at the Ni/Si and Cr/Si interfaces, respectively.

Original languageEnglish (US)
Pages (from-to)57-60
Number of pages4
JournalJournal of Crystal Growth
Volume165
Issue number1-2
StatePublished - Jul 1996

Fingerprint

Silicides
Rutherford backscattering spectroscopy
Excimer lasers
Chromium
Silicon
Nickel
excimer lasers
Spectrometry
Electron beams
chromium
Evaporation
Metals
nickel
Crystalline materials
Transmission electron microscopy
Fabrication
fabrication
Lasers
silicides
Substrates

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Barbero, C. J., Deng, C., Sigmon, T. W., Russell, S. W., & Alford, T. (1996). The fabrication of nickel and chromium suicide using an XeCl excimer laser. Journal of Crystal Growth, 165(1-2), 57-60.

The fabrication of nickel and chromium suicide using an XeCl excimer laser. / Barbero, C. J.; Deng, C.; Sigmon, T. W.; Russell, S. W.; Alford, Terry.

In: Journal of Crystal Growth, Vol. 165, No. 1-2, 07.1996, p. 57-60.

Research output: Contribution to journalArticle

Barbero, CJ, Deng, C, Sigmon, TW, Russell, SW & Alford, T 1996, 'The fabrication of nickel and chromium suicide using an XeCl excimer laser', Journal of Crystal Growth, vol. 165, no. 1-2, pp. 57-60.
Barbero, C. J. ; Deng, C. ; Sigmon, T. W. ; Russell, S. W. ; Alford, Terry. / The fabrication of nickel and chromium suicide using an XeCl excimer laser. In: Journal of Crystal Growth. 1996 ; Vol. 165, No. 1-2. pp. 57-60.
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