The fabrication of nickel and chromium suicide using an XeCl excimer laser

C. J. Barbero, C. Deng, T. W. Sigmon, S. W. Russell, Terry Alford

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 Å by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm2, and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi2 and CrSi2 at the Ni/Si and Cr/Si interfaces, respectively.

Original languageEnglish (US)
Pages (from-to)57-60
Number of pages4
JournalJournal of Crystal Growth
Volume165
Issue number1-2
DOIs
StatePublished - Jul 1996

    Fingerprint

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this