The fabrication of nickel and chromium suicide using an XeCl excimer laser

C. J. Barbero; C. Deng; T. W. Sigmon; S. W. Russell; Terry Alford

doi:10.1016/0022-0248(95)00427-0

The fabrication of nickel and chromium suicide using an XeCl excimer laser

C. J. Barbero, C. Deng, T. W. Sigmon, S. W. Russell, Terry Alford

Chemical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 Å by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm², and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi₂ and CrSi₂ at the Ni/Si and Cr/Si interfaces, respectively.

Original language	English (US)
Pages (from-to)	57-60
Number of pages	4
Journal	Journal of Crystal Growth
Volume	165
Issue number	1-2
DOIs	https://doi.org/10.1016/0022-0248(95)00427-0
State	Published - Jul 1996

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/0022-0248(95)00427-0

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title = "The fabrication of nickel and chromium suicide using an XeCl excimer laser",

abstract = "The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 {\AA} by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm2, and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi2 and CrSi2 at the Ni/Si and Cr/Si interfaces, respectively.",

author = "Barbero, {C. J.} and C. Deng and Sigmon, {T. W.} and Russell, {S. W.} and Terry Alford",

year = "1996",

month = jul,

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language = "English (US)",

volume = "165",

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T1 - The fabrication of nickel and chromium suicide using an XeCl excimer laser

AU - Barbero, C. J.

AU - Deng, C.

AU - Sigmon, T. W.

AU - Russell, S. W.

AU - Alford, Terry

PY - 1996/7

Y1 - 1996/7

N2 - The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 Å by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm2, and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi2 and CrSi2 at the Ni/Si and Cr/Si interfaces, respectively.

AB - The formation of nickel and chromium silicides using an XeCl excimer laser has been studied. Both metals are deposited to a thickness of 500 Å by electron beam evaporation on silicon substrates. These layers are then processed using laser fluences ranging from 0.45 to 1.4 J/cm2, and a variable number of pulses. Rutherford backscattering spectrometry (RBS) and cross-sectional transmission electron microscopy (XTEM) indicate the formation of crystalline NiSi2 and CrSi2 at the Ni/Si and Cr/Si interfaces, respectively.

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EP - 60

JO - Journal of Crystal Growth

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IS - 1-2

ER -

The fabrication of nickel and chromium suicide using an XeCl excimer laser

Abstract

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