The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator

Xiaotun Qiu, Jie Zhu, Hongyu Yu, Ziyu Wang, Jon Oiler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper described the influence of ultraviolet (UV) radiation, relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO based Film Bulk Acoustic-wave Resonator (FBAR). Under UV illumination, the TCF of the FBAR increased. This was attributed to the adsorption of oxygen due to the electrons generated by UV absorption. Water molecules can replace adsorbed oxygen on the ZnO surface. However at high temperature, less water can be sustained by the ZnO film due to its energetically unstable nature. In this way, the TCF in high RH became smaller. When reducing gases, such as acetone, were exposed to FBAR, a smaller TCF was observed.

Original languageEnglish (US)
Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
DOIs
StatePublished - Dec 1 2009
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: Sep 20 2009Sep 23 2009

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2009 IEEE International Ultrasonics Symposium, IUS 2009
CountryItaly
CityRome
Period9/20/099/23/09

Keywords

  • Film bulk acoustic-wave resonator
  • Reducing gases
  • Relative humidity
  • Tempersture coefficient of resonant frequency
  • Ultraviolet radiation

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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