The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator

Xiaotun Qiu; Jie Zhu; Hongyu Yu; Ziyu Wang; Jon Oiler

doi:10.1109/ULTSYM.2009.5441592

The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator

Xiaotun Qiu, Jie Zhu, Hongyu Yu, Ziyu Wang, Jon Oiler

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper described the influence of ultraviolet (UV) radiation, relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO based Film Bulk Acoustic-wave Resonator (FBAR). Under UV illumination, the TCF of the FBAR increased. This was attributed to the adsorption of oxygen due to the electrons generated by UV absorption. Water molecules can replace adsorbed oxygen on the ZnO surface. However at high temperature, less water can be sustained by the ZnO film due to its energetically unstable nature. In this way, the TCF in high RH became smaller. When reducing gases, such as acetone, were exposed to FBAR, a smaller TCF was observed.

Original language	English (US)
Title of host publication	2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
DOIs	https://doi.org/10.1109/ULTSYM.2009.5441592
State	Published - Dec 1 2009
Event	2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy Duration: Sep 20 2009 → Sep 23 2009

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
ISSN (Print)	1051-0117

Other

Other	2009 IEEE International Ultrasonics Symposium, IUS 2009
Country/Territory	Italy
City	Rome
Period	9/20/09 → 9/23/09

Keywords

Film bulk acoustic-wave resonator
Reducing gases
Relative humidity
Tempersture coefficient of resonant frequency
Ultraviolet radiation

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2009.5441592

Cite this

Qiu, X., Zhu, J., Yu, H., Wang, Z., & Oiler, J. (2009). The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator. In 2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009 Article 5441592 (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2009.5441592

The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator. / Qiu, Xiaotun; Zhu, Jie; Yu, Hongyu et al.
2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009. 2009. 5441592 (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Qiu, X, Zhu, J, Yu, H, Wang, Z & Oiler, J 2009, The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator. in 2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009., 5441592, Proceedings - IEEE Ultrasonics Symposium, 2009 IEEE International Ultrasonics Symposium, IUS 2009, Rome, Italy, 9/20/09. https://doi.org/10.1109/ULTSYM.2009.5441592

Qiu X, Zhu J, Yu H, Wang Z, Oiler J. The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator. In 2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009. 2009. 5441592. (Proceedings - IEEE Ultrasonics Symposium). doi: 10.1109/ULTSYM.2009.5441592

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title = "The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator",

abstract = "This paper described the influence of ultraviolet (UV) radiation, relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO based Film Bulk Acoustic-wave Resonator (FBAR). Under UV illumination, the TCF of the FBAR increased. This was attributed to the adsorption of oxygen due to the electrons generated by UV absorption. Water molecules can replace adsorbed oxygen on the ZnO surface. However at high temperature, less water can be sustained by the ZnO film due to its energetically unstable nature. In this way, the TCF in high RH became smaller. When reducing gases, such as acetone, were exposed to FBAR, a smaller TCF was observed.",

keywords = "Film bulk acoustic-wave resonator, Reducing gases, Relative humidity, Tempersture coefficient of resonant frequency, Ultraviolet radiation",

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AU - Oiler, Jon

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N2 - This paper described the influence of ultraviolet (UV) radiation, relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO based Film Bulk Acoustic-wave Resonator (FBAR). Under UV illumination, the TCF of the FBAR increased. This was attributed to the adsorption of oxygen due to the electrons generated by UV absorption. Water molecules can replace adsorbed oxygen on the ZnO surface. However at high temperature, less water can be sustained by the ZnO film due to its energetically unstable nature. In this way, the TCF in high RH became smaller. When reducing gases, such as acetone, were exposed to FBAR, a smaller TCF was observed.

AB - This paper described the influence of ultraviolet (UV) radiation, relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO based Film Bulk Acoustic-wave Resonator (FBAR). Under UV illumination, the TCF of the FBAR increased. This was attributed to the adsorption of oxygen due to the electrons generated by UV absorption. Water molecules can replace adsorbed oxygen on the ZnO surface. However at high temperature, less water can be sustained by the ZnO film due to its energetically unstable nature. In this way, the TCF in high RH became smaller. When reducing gases, such as acetone, were exposed to FBAR, a smaller TCF was observed.

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The effects of ultraviolet radiation, humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic-wave resonator

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