TY - JOUR
T1 - The effects of temperature, relative humidity and reducing gases on the ultraviolet response of ZnO based film bulk acoustic-wave resonator
AU - Qiu, Xiaotun
AU - Tang, Rui
AU - Zhu, Jie
AU - Oiler, Jon
AU - Yu, Cunjiang
AU - Wang, Ziyu
AU - Yu, Hongyu
N1 - Funding Information:
We would like to thank Dr. Eun Sok Kim and Mr. Shih-Jui Chen at University of Southern California for providing ZnO film. This work was supported by NASA Astrobiology Institute and ASU dissertation fellowship.
PY - 2011/1/28
Y1 - 2011/1/28
N2 - This study investigated the influence of temperature, relative humidity and reducing gases on the ultraviolet (UV) response of ZnO based film bulk acoustic-wave resonator (FBAR). As temperature increased, the UV response of the FBAR degraded. This was attributed to the softening of the ZnO film with increasing temperature. Water molecules can replace adsorbed oxygen on the ZnO surface. At high relative humidity, more oxygen was replaced by water. In this way, the density of the ZnO film increased and less oxygen was left on the surface to be desorbed by UV, both of which contributed to a lower UV response. Reducing gases, such as acetone, can react with the surface adsorbed oxygen and reduce the density of the ZnO film, resulting in UV response degradation.
AB - This study investigated the influence of temperature, relative humidity and reducing gases on the ultraviolet (UV) response of ZnO based film bulk acoustic-wave resonator (FBAR). As temperature increased, the UV response of the FBAR degraded. This was attributed to the softening of the ZnO film with increasing temperature. Water molecules can replace adsorbed oxygen on the ZnO surface. At high relative humidity, more oxygen was replaced by water. In this way, the density of the ZnO film increased and less oxygen was left on the surface to be desorbed by UV, both of which contributed to a lower UV response. Reducing gases, such as acetone, can react with the surface adsorbed oxygen and reduce the density of the ZnO film, resulting in UV response degradation.
KW - Film bulk acoustic-wave resonator
KW - Reducing gases
KW - Relative humidity
KW - Temperature
KW - Ultraviolet
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U2 - 10.1016/j.snb.2010.07.052
DO - 10.1016/j.snb.2010.07.052
M3 - Article
AN - SCOPUS:78751580642
SN - 0925-4005
VL - 151
SP - 360
EP - 364
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 2
ER -