The effects of temperature, relative humidity and reducing gases on the ultraviolet response of ZnO based film bulk acoustic-wave resonator

Xiaotun Qiu, Rui Tang, Jie Zhu, Jon Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu

Research output: Contribution to journalArticle

27 Scopus citations

Abstract

This study investigated the influence of temperature, relative humidity and reducing gases on the ultraviolet (UV) response of ZnO based film bulk acoustic-wave resonator (FBAR). As temperature increased, the UV response of the FBAR degraded. This was attributed to the softening of the ZnO film with increasing temperature. Water molecules can replace adsorbed oxygen on the ZnO surface. At high relative humidity, more oxygen was replaced by water. In this way, the density of the ZnO film increased and less oxygen was left on the surface to be desorbed by UV, both of which contributed to a lower UV response. Reducing gases, such as acetone, can react with the surface adsorbed oxygen and reduce the density of the ZnO film, resulting in UV response degradation.

Original languageEnglish (US)
Pages (from-to)360-364
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume151
Issue number2
DOIs
StatePublished - Jan 28 2011

Keywords

  • Film bulk acoustic-wave resonator
  • Reducing gases
  • Relative humidity
  • Temperature
  • Ultraviolet

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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