The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

Xiaotun Qiu, Ziyu Wang, Jie Zhu, Jon Oiler, Rui Tang, Cunjiang Yu, Hongyu Yu

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.

Original languageEnglish (US)
Article number5585471
Pages (from-to)1902-1905
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume57
Issue number9
DOIs
StatePublished - Sep 2010

Fingerprint

resonant frequencies
humidity
Resonators
Natural frequencies
Atmospheric humidity
resonators
Acoustic waves
acoustics
coefficients
Gases
gases
Temperature
temperature
oxygen
Oxygen
moisture
acetone
Acetone
Moisture
Molecules

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics
  • Instrumentation

Cite this

The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator. / Qiu, Xiaotun; Wang, Ziyu; Zhu, Jie; Oiler, Jon; Tang, Rui; Yu, Cunjiang; Yu, Hongyu.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 57, No. 9, 5585471, 09.2010, p. 1902-1905.

Research output: Contribution to journalArticle

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