The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

Xiaotun Qiu, Ziyu Wang, Jie Zhu, Jon Oiler, Rui Tang, Cunjiang Yu, Hongyu Yu

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.

Original languageEnglish (US)
Article number5585471
Pages (from-to)1902-1905
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume57
Issue number9
DOIs
StatePublished - Sep 1 2010

    Fingerprint

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Cite this