Abstract

Indium tin oxide (ITO) thin layers were deposited onto glass substrates by RF magnetron sputtering using different pressures. Subsequently, the films were annealed in a reducing atmosphere at 500 °C for 30 min. Electrical properties were measured by Hall Effect analysis and four-point probe measurements. Optical properties were determined by UV-Vis spectrophotometery. Film structures and compositions were analyzed by X-ray diffractometry and X-ray photoelectron spectroscopy, respectively. The effect of sputter pressure and additional anneals was investigated. The results revealed that the lowest resistivity of 1.69 × 10- 4 Ω cm was achieved at low pressure (1.2 Pa) and the highest transmittance of ~ 90% was obtained after a second anneal. However, the second anneal decreased the mobility and the conductivity especially for high sputtering pressures. This study also describes the effect of Sn defect clustering on electrical properties of the ITO films.

Original languageEnglish (US)
Pages (from-to)3326-3331
Number of pages6
JournalThin Solid Films
Volume518
Issue number12
DOIs
StatePublished - Apr 2 2010

Fingerprint

Tin oxides
indium oxides
Indium
tin oxides
Sputtering
sputtering
electrical properties
optical properties
Glass
glass
Electric properties
Hall effect
oxide films
transmittance
magnetron sputtering
x rays
low pressure
photoelectron spectroscopy
Magnetron sputtering
X ray diffraction analysis

Keywords

  • Deposition pressure
  • Indium tin oxide
  • Sn defects
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

The effect of sputtering pressure on electrical, optical and structure properties of indium tin oxide on glass. / Elhalawaty, S.; Sivaramakrishnan, K.; Theodore, N. D.; Alford, Terry.

In: Thin Solid Films, Vol. 518, No. 12, 02.04.2010, p. 3326-3331.

Research output: Contribution to journalArticle

Elhalawaty, S. ; Sivaramakrishnan, K. ; Theodore, N. D. ; Alford, Terry. / The effect of sputtering pressure on electrical, optical and structure properties of indium tin oxide on glass. In: Thin Solid Films. 2010 ; Vol. 518, No. 12. pp. 3326-3331.
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