Inertial sliders are often used to produce coarse relative positioning for scanning probe microscopes. This article describes the design, dynamic analysis, and control of a compact four-segment piezoceramic tube scanner employing an inertial slider. Velocity feedback control, implemented using two-segment piezoelectric sensing, was used to suppress undesired vibrations in the tube, and to improve scanner step uniformity. The control analysis was based on an empirical open-loop identification of the as-built tube behavior, which was also measured using the two-segment sensing technique. A reset integrator friction simulation predicted the overall system performance, and showed good agreement with experimental results.
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