The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider

Shih-Hui Chao, Joseph L. Garbini, William M. Dougherty, John A. Sidles

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Inertial sliders are often used to produce coarse relative positioning for scanning probe microscopes. This article describes the design, dynamic analysis, and control of a compact four-segment piezoceramic tube scanner employing an inertial slider. Velocity feedback control, implemented using two-segment piezoelectric sensing, was used to suppress undesired vibrations in the tube, and to improve scanner step uniformity. The control analysis was based on an empirical open-loop identification of the as-built tube behavior, which was also measured using the two-segment sensing technique. A reset integrator friction simulation predicted the overall system performance, and showed good agreement with experimental results.

Original languageEnglish (US)
Article number063710
JournalReview of Scientific Instruments
Volume77
Issue number6
DOIs
StatePublished - Jul 11 2006
Externally publishedYes

Fingerprint

chutes
scanners
tubes
Velocity control
Dynamic analysis
Feedback control
Microscopes
integrators
Friction
Scanning
feedback control
positioning
friction
microscopes
vibration
scanning
probes
simulation

ASJC Scopus subject areas

  • Instrumentation

Cite this

The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider. / Chao, Shih-Hui; Garbini, Joseph L.; Dougherty, William M.; Sidles, John A.

In: Review of Scientific Instruments, Vol. 77, No. 6, 063710, 11.07.2006.

Research output: Contribution to journalArticle

Chao, Shih-Hui ; Garbini, Joseph L. ; Dougherty, William M. ; Sidles, John A. / The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider. In: Review of Scientific Instruments. 2006 ; Vol. 77, No. 6.
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