The characterization of TiNi shape-memory actuated microvalves

B. K. Lai; G. Hahm; L. You; C. L. Shih; H. Kahn; Stephen Phillips; A. H. Heuer

The characterization of TiNi shape-memory actuated microvalves

B. K. Lai, G. Hahm, L. You, C. L. Shih, H. Kahn, Stephen Phillips, A. H. Heuer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

Original language	English (US)
Title of host publication	Materials Research Society Symposium - Proceedings
Editors	H Kahn, M Boer, M Judy, S Spearing
Volume	657
State	Published - 2001
Externally published	Yes
Event	Material Science of Microelectromechanical Systems (MEMS) Devices III - Boston, MA, United States Duration: Nov 27 2000 → Nov 28 2000

Other

Other	Material Science of Microelectromechanical Systems (MEMS) Devices III
Country/Territory	United States
City	Boston, MA
Period	11/27/00 → 11/28/00

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials

Cite this

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title = "The characterization of TiNi shape-memory actuated microvalves",

abstract = "Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.",

author = "Lai, {B. K.} and G. Hahm and L. You and Shih, {C. L.} and H. Kahn and Stephen Phillips and Heuer, {A. H.}",

year = "2001",

language = "English (US)",

volume = "657",

editor = "H Kahn and M Boer and M Judy and S Spearing",

booktitle = "Materials Research Society Symposium - Proceedings",

note = "Material Science of Microelectromechanical Systems (MEMS) Devices III ; Conference date: 27-11-2000 Through 28-11-2000",

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TY - GEN

T1 - The characterization of TiNi shape-memory actuated microvalves

AU - Lai, B. K.

AU - Hahm, G.

AU - You, L.

AU - Shih, C. L.

AU - Kahn, H.

AU - Phillips, Stephen

AU - Heuer, A. H.

PY - 2001

Y1 - 2001

N2 - Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

AB - Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

UR - http://www.scopus.com/inward/record.url?scp=0035559779&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035559779&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0035559779

VL - 657

BT - Materials Research Society Symposium - Proceedings

A2 - Kahn, H

A2 - Boer, M

A2 - Judy, M

A2 - Spearing, S

T2 - Material Science of Microelectromechanical Systems (MEMS) Devices III

Y2 - 27 November 2000 through 28 November 2000

ER -

The characterization of TiNi shape-memory actuated microvalves

Abstract

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ASJC Scopus subject areas

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