TFT backplane technology development for flexible displays

Gregory Raupp, Nicholas Colaneri, Shawn M. O'Rourke, Jann Kaminski, David Allee, Sameer M. Venugopal, Edward J. Bawolek, Douglas E. Loy, Curt Moyer, Scott K. Ageno, Barry P. O'Brien, Dirk Bottesch, Steve Rednour, Rob Blanchard, Michael Marrs, Jeff Dailey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The Flexible Display Center (FDC) at Arizona State University has created comprehensive capability in backplane design, fabrication, assembly, test and evaluation to enable rapid cycles of learning and development Inflexible thin film transistor (TFT) backplane technology. FDC backplanes are integrated with partners' frontplane technologies to produce high performance active matrix (AM) reflective electrophoretic ink and cholesteric liquid crystal and emissive OLED flexible display technology demonstrators (TDs). We fabricate backplanes on a 6" wafer-scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are installing a GENII (370 × 470 mm) display-scale Pilot Line, with qualified operation slated for 2006. This paper overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6" line with rigid substrates, to transferring the process to flexible plastic substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II.

Original languageEnglish (US)
Title of host publicationSID Conference Record of the International Display Research Conference
Pages17-20
Number of pages4
StatePublished - 2006
EventSID 26th International Display Research Conference - Kent, OH, United States
Duration: Sep 18 2006Sep 21 2006

Other

OtherSID 26th International Display Research Conference
CountryUnited States
CityKent, OH
Period9/18/069/21/06

Keywords

  • Backplane electronics
  • Cholesteric liquid crystal
  • Electrophoretic ink
  • Flexible displays
  • OLEDs
  • Thin Film Transistors (TFTs)

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Raupp, G., Colaneri, N., O'Rourke, S. M., Kaminski, J., Allee, D., Venugopal, S. M., Bawolek, E. J., Loy, D. E., Moyer, C., Ageno, S. K., O'Brien, B. P., Bottesch, D., Rednour, S., Blanchard, R., Marrs, M., & Dailey, J. (2006). TFT backplane technology development for flexible displays. In SID Conference Record of the International Display Research Conference (pp. 17-20)