TFT backplane technology development for flexible displays

Gregory Raupp; Nicholas Colaneri; Shawn M. O'Rourke; Jann Kaminski; David Allee; Sameer M. Venugopal; Edward J. Bawolek; Douglas E. Loy; Curt Moyer; Scott K. Ageno; Barry P. O'Brien; Dirk Bottesch; Steve Rednour; Rob Blanchard; Michael Marrs; Jeff Dailey

TFT backplane technology development for flexible displays

Gregory Raupp, Nicholas Colaneri, Shawn M. O'Rourke, Jann Kaminski, David Allee, Sameer M. Venugopal, Edward J. Bawolek, Douglas E. Loy, Curt Moyer, Scott K. Ageno, Barry P. O'Brien, Dirk Bottesch, Steve Rednour, Rob Blanchard, Michael Marrs, Jeff Dailey

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The Flexible Display Center (FDC) at Arizona State University has created comprehensive capability in backplane design, fabrication, assembly, test and evaluation to enable rapid cycles of learning and development Inflexible thin film transistor (TFT) backplane technology. FDC backplanes are integrated with partners' frontplane technologies to produce high performance active matrix (AM) reflective electrophoretic ink and cholesteric liquid crystal and emissive OLED flexible display technology demonstrators (TDs). We fabricate backplanes on a 6" wafer-scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are installing a GENII (370 × 470 mm) display-scale Pilot Line, with qualified operation slated for 2006. This paper overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6" line with rigid substrates, to transferring the process to flexible plastic substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II.

Original language	English (US)
Title of host publication	SID Conference Record of the International Display Research Conference
Pages	17-20
Number of pages	4
State	Published - 2006
Event	SID 26th International Display Research Conference - Kent, OH, United States Duration: Sep 18 2006 → Sep 21 2006

Other

Other	SID 26th International Display Research Conference
Country/Territory	United States
City	Kent, OH
Period	9/18/06 → 9/21/06

Keywords

Backplane electronics
Cholesteric liquid crystal
Electrophoretic ink
Flexible displays
OLEDs
Thin Film Transistors (TFTs)

ASJC Scopus subject areas

Engineering(all)

Cite this

Raupp, G., Colaneri, N., O'Rourke, S. M., Kaminski, J., Allee, D., Venugopal, S. M., Bawolek, E. J., Loy, D. E., Moyer, C., Ageno, S. K., O'Brien, B. P., Bottesch, D., Rednour, S., Blanchard, R., Marrs, M., & Dailey, J. (2006). TFT backplane technology development for flexible displays. In SID Conference Record of the International Display Research Conference (pp. 17-20)

Raupp, G, Colaneri, N, O'Rourke, SM, Kaminski, J, Allee, D, Venugopal, SM, Bawolek, EJ, Loy, DE, Moyer, C, Ageno, SK, O'Brien, BP, Bottesch, D, Rednour, S, Blanchard, R, Marrs, M & Dailey, J 2006, TFT backplane technology development for flexible displays. in SID Conference Record of the International Display Research Conference. pp. 17-20, SID 26th International Display Research Conference, Kent, OH, United States, 9/18/06.

@inproceedings{293dc3308a0e472c8f928aaee36a5227,

title = "TFT backplane technology development for flexible displays",

abstract = "The Flexible Display Center (FDC) at Arizona State University has created comprehensive capability in backplane design, fabrication, assembly, test and evaluation to enable rapid cycles of learning and development Inflexible thin film transistor (TFT) backplane technology. FDC backplanes are integrated with partners' frontplane technologies to produce high performance active matrix (AM) reflective electrophoretic ink and cholesteric liquid crystal and emissive OLED flexible display technology demonstrators (TDs). We fabricate backplanes on a 6{"} wafer-scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are installing a GENII (370 × 470 mm) display-scale Pilot Line, with qualified operation slated for 2006. This paper overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6{"} line with rigid substrates, to transferring the process to flexible plastic substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II.",

keywords = "Backplane electronics, Cholesteric liquid crystal, Electrophoretic ink, Flexible displays, OLEDs, Thin Film Transistors (TFTs)",

author = "Gregory Raupp and Nicholas Colaneri and O'Rourke, {Shawn M.} and Jann Kaminski and David Allee and Venugopal, {Sameer M.} and Bawolek, {Edward J.} and Loy, {Douglas E.} and Curt Moyer and Ageno, {Scott K.} and O'Brien, {Barry P.} and Dirk Bottesch and Steve Rednour and Rob Blanchard and Michael Marrs and Jeff Dailey",

year = "2006",

language = "English (US)",

pages = "17--20",

booktitle = "SID Conference Record of the International Display Research Conference",

note = "SID 26th International Display Research Conference ; Conference date: 18-09-2006 Through 21-09-2006",

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TY - GEN

T1 - TFT backplane technology development for flexible displays

AU - Raupp, Gregory

AU - Colaneri, Nicholas

AU - O'Rourke, Shawn M.

AU - Kaminski, Jann

AU - Allee, David

AU - Venugopal, Sameer M.

AU - Bawolek, Edward J.

AU - Loy, Douglas E.

AU - Moyer, Curt

AU - Ageno, Scott K.

AU - O'Brien, Barry P.

AU - Bottesch, Dirk

AU - Rednour, Steve

AU - Blanchard, Rob

AU - Marrs, Michael

AU - Dailey, Jeff

PY - 2006

Y1 - 2006

N2 - The Flexible Display Center (FDC) at Arizona State University has created comprehensive capability in backplane design, fabrication, assembly, test and evaluation to enable rapid cycles of learning and development Inflexible thin film transistor (TFT) backplane technology. FDC backplanes are integrated with partners' frontplane technologies to produce high performance active matrix (AM) reflective electrophoretic ink and cholesteric liquid crystal and emissive OLED flexible display technology demonstrators (TDs). We fabricate backplanes on a 6" wafer-scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are installing a GENII (370 × 470 mm) display-scale Pilot Line, with qualified operation slated for 2006. This paper overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6" line with rigid substrates, to transferring the process to flexible plastic substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II.

AB - The Flexible Display Center (FDC) at Arizona State University has created comprehensive capability in backplane design, fabrication, assembly, test and evaluation to enable rapid cycles of learning and development Inflexible thin film transistor (TFT) backplane technology. FDC backplanes are integrated with partners' frontplane technologies to produce high performance active matrix (AM) reflective electrophoretic ink and cholesteric liquid crystal and emissive OLED flexible display technology demonstrators (TDs). We fabricate backplanes on a 6" wafer-scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are installing a GENII (370 × 470 mm) display-scale Pilot Line, with qualified operation slated for 2006. This paper overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6" line with rigid substrates, to transferring the process to flexible plastic substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II.

KW - Backplane electronics

KW - Cholesteric liquid crystal

KW - Electrophoretic ink

KW - Flexible displays

KW - OLEDs

KW - Thin Film Transistors (TFTs)

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M3 - Conference contribution

AN - SCOPUS:34748818113

SP - 17

EP - 20

BT - SID Conference Record of the International Display Research Conference

T2 - SID 26th International Display Research Conference

Y2 - 18 September 2006 through 21 September 2006

ER -

TFT backplane technology development for flexible displays

Abstract

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Keywords

ASJC Scopus subject areas

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