@inproceedings{50b34ac0ff504c2dbb5ecc363d3ead84,
title = "Texture evolution and stress in silver thin films on different substrates using X-ray diffraction",
abstract = "Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO2 substrates had strong {111} texture when compared with Ag films on polyethylene naphthalate (PEN). It was noted that the difference of strain energy density (ΔEe) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO2 (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO2 was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.",
author = "Yeongseok Zoo and Terry Alford",
year = "2007",
doi = "10.1557/proc-0990-b08-07",
language = "English (US)",
isbn = "9781558999503",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "147--152",
booktitle = "Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics",
note = "2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",
}