Texture evolution and stress in silver thin films on different substrates using X-ray diffraction

Yeongseok Zoo; Terry Alford

doi:10.1557/proc-0990-b08-07

Texture evolution and stress in silver thin films on different substrates using X-ray diffraction

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO₂ substrates had strong {111} texture when compared with Ag films on polyethylene naphthalate (PEN). It was noted that the difference of strain energy density (ΔE_e) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO₂ (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO₂ was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.

Original language	English (US)
Title of host publication	Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics
Publisher	Materials Research Society
Pages	147-152
Number of pages	6
ISBN (Print)	9781558999503
DOIs	https://doi.org/10.1557/proc-0990-b08-07
State	Published - 2007
Event	2007 MRS Spring Meeting - San Francisco, CA, United States Duration: Apr 9 2007 → Apr 13 2007

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	990
ISSN (Print)	0272-9172

Other

Other	2007 MRS Spring Meeting
Country/Territory	United States
City	San Francisco, CA
Period	4/9/07 → 4/13/07

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-0990-b08-07

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Zoo, Y., & Alford, T. (2007). Texture evolution and stress in silver thin films on different substrates using X-ray diffraction. In Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics (pp. 147-152). (Materials Research Society Symposium Proceedings; Vol. 990). Materials Research Society. https://doi.org/10.1557/proc-0990-b08-07

Texture evolution and stress in silver thin films on different substrates using X-ray diffraction. / Zoo, Yeongseok; Alford, Terry.

Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics. Materials Research Society, 2007. p. 147-152 (Materials Research Society Symposium Proceedings; Vol. 990).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zoo, Y & Alford, T 2007, Texture evolution and stress in silver thin films on different substrates using X-ray diffraction. in Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics. Materials Research Society Symposium Proceedings, vol. 990, Materials Research Society, pp. 147-152, 2007 MRS Spring Meeting, San Francisco, CA, United States, 4/9/07. https://doi.org/10.1557/proc-0990-b08-07

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abstract = "Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO2 substrates had strong {111} texture when compared with Ag films on polyethylene naphthalate (PEN). It was noted that the difference of strain energy density (ΔEe) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO2 (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO2 was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.",

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doi = "10.1557/proc-0990-b08-07",

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AB - Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO2 substrates had strong {111} texture when compared with Ag films on polyethylene naphthalate (PEN). It was noted that the difference of strain energy density (ΔEe) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO2 (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO2 was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.

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Texture evolution and stress in silver thin films on different substrates using X-ray diffraction

Abstract

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ASJC Scopus subject areas

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