Texture and microstructure evolution in Silver thin films with FACET

Asit Rairkar, Jie Zhang, James Adams

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Metallic polycrystalline thin films are used in a plethora of applications, including especially metallic interconnects for the microelectronics industry. Despite the numerous approaches at modeling and simulating processing of these films, there have not been any simulation tools, which can accurately predict texture and microstructure evolution in these films. We have developed a novel 2D model called FACET for the simulation of polycrystalline thin film growth at realistic spatial and time scales. The basic idea is to use the results of smaller-scale atomic simulations (density functional theory, molecular dynamics, and lattice Monte Carlo) to provide input and guidance on the evolution of grain structure and texture on a micron scale. The feature scale model is based on describing grains in terms of two-dimensional faceted surfaces and grain boundaries. The model includes the major phenomena involved in film growth, including deposition, nucleation, surface diffusion (on the substrate and on the growing film), inter-facet diffusion, and grain growth and coarsening. In addition, the texture of each grain is treated individually, so that the texture evolution of the system can be simulated. Predictions of the FACET code are compared with previous experimental studies of texture and microstructure in Silver films.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsP.M. Anderson, T. Foecke, A. Misra, R.E. Rudd
Pages307-312
Number of pages6
Volume821
StatePublished - 2004
EventNanoscale Materials and Modeling - Relations Among Processing, Microstructure and Mechanical Properties - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

Other

OtherNanoscale Materials and Modeling - Relations Among Processing, Microstructure and Mechanical Properties
CountryUnited States
CitySan Francisco, CA
Period4/13/044/16/04

Fingerprint

Silver
Textures
Film growth
Thin films
Microstructure
Surface diffusion
Crystal microstructure
Coarsening
Grain growth
Microelectronics
Density functional theory
Molecular dynamics
Grain boundaries
Nucleation
Substrates
Processing
Industry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Rairkar, A., Zhang, J., & Adams, J. (2004). Texture and microstructure evolution in Silver thin films with FACET. In P. M. Anderson, T. Foecke, A. Misra, & R. E. Rudd (Eds.), Materials Research Society Symposium Proceedings (Vol. 821, pp. 307-312). [P8.14]

Texture and microstructure evolution in Silver thin films with FACET. / Rairkar, Asit; Zhang, Jie; Adams, James.

Materials Research Society Symposium Proceedings. ed. / P.M. Anderson; T. Foecke; A. Misra; R.E. Rudd. Vol. 821 2004. p. 307-312 P8.14.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rairkar, A, Zhang, J & Adams, J 2004, Texture and microstructure evolution in Silver thin films with FACET. in PM Anderson, T Foecke, A Misra & RE Rudd (eds), Materials Research Society Symposium Proceedings. vol. 821, P8.14, pp. 307-312, Nanoscale Materials and Modeling - Relations Among Processing, Microstructure and Mechanical Properties, San Francisco, CA, United States, 4/13/04.
Rairkar A, Zhang J, Adams J. Texture and microstructure evolution in Silver thin films with FACET. In Anderson PM, Foecke T, Misra A, Rudd RE, editors, Materials Research Society Symposium Proceedings. Vol. 821. 2004. p. 307-312. P8.14
Rairkar, Asit ; Zhang, Jie ; Adams, James. / Texture and microstructure evolution in Silver thin films with FACET. Materials Research Society Symposium Proceedings. editor / P.M. Anderson ; T. Foecke ; A. Misra ; R.E. Rudd. Vol. 821 2004. pp. 307-312
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