Testing of radiation hardness in the extreme-ultraviolet spectral region

U. Arp, I. Ermanoski, C. Tarrio, S. Grantham, S. Hill, P. Dhez, T. B. Lucatorto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Currently we are commissioning a second multilayer-based beamline to study the radiation hardness of multilayers under extreme-ultraviolet (EUV) irradiation in an oxidizing atmosphere. Multilayer lifetime is one of the most important issues for the commercialization of extreme-ultraviolet lithography. The beamline employs a spherical multilayer mirror and a beryllium filter. The mirror demagnifies the source and reflects 13.4 nm radiation as well as visible light. The beryllium filter suppresses the visible light reflected by the mirror and provides also a barrier between the extremely clean storage ring vacuum and the water atmosphere of the test chamber.

Original languageEnglish (US)
Title of host publicationSYNCHROTRON RADIATION INSTRUMENTATION
Subtitle of host publicationNinth International Conference on Synchrotron Radiation Instrumentation
Pages481-484
Number of pages4
DOIs
StatePublished - Mar 26 2007
Externally publishedYes
EventSYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation - Daegu, Korea, Republic of
Duration: May 28 2006Jun 28 2006

Publication series

NameAIP Conference Proceedings
Volume879
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherSYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation
CountryKorea, Republic of
CityDaegu
Period5/28/066/28/06

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Keywords

  • Electron and positron beams
  • Environmental and radiation effects on optical elements, devices, and systems
  • Multilayers
  • Processes caused by visible and UV light
  • Storage rings
  • Synchrotron radiation
  • Synchrotron radiation instrumentation

ASJC Scopus subject areas

  • Ecology, Evolution, Behavior and Systematics
  • Ecology
  • Plant Science
  • Physics and Astronomy(all)
  • Nature and Landscape Conservation

Cite this

Arp, U., Ermanoski, I., Tarrio, C., Grantham, S., Hill, S., Dhez, P., & Lucatorto, T. B. (2007). Testing of radiation hardness in the extreme-ultraviolet spectral region. In SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation (pp. 481-484). (AIP Conference Proceedings; Vol. 879). https://doi.org/10.1063/1.2436103